Abstract: An optical probe for detecting a biological tissue includes a surface imaging module and a tomography capturing module. The surface imaging module captures and creates a surface image of the biological tissue, and at least includes a light source emitting a first detecting light. The tomography capturing module captures a tomography image of the biological tissue and receives a second detecting light. The first detecting light passes via a first optical path from the light source to an imaging sensor through the biological tissue, a telecentric lens, a first optical mirror, and a lens assembly in sequence. The second detecting light passes via a second optical path from a first collimator to the first collimator through a scanner, the first optical mirror, the telecentric lens, the biological tissue, the telecentric lens, the first optical mirror, the scanner, and the first collimator in sequence.

Abstract: Provided is an interferometer for inspecting a test sample. The interferometer includes: a light source for providing a light beam; a beam splitting element, splitting the light beam into first and second incident light, wherein the first incident light is reflected by the test sample into first reflection light; a reflecting element, reflecting the second incident light into second reflection light; an optical detection element, receiving the first and the second reflection light into an interference signal; and a signal processing module, coupled to the optical detection element, for performing spatial differential calculation on the interference signal to generate a demodulation image of the test sample.

Abstract: Provided is an interferometer for inspecting a test sample. The interferometer includes: a light source for providing a light beam; a beam splitting element, splitting the light beam into first and second incident light, wherein the first incident light is reflected by the test sample into first reflection light; a reflecting element, reflecting the second incident light into second reflection light; an optical detection element, receiving the first and the second reflection light into an interference signal; and a signal processing module, coupled to the optical detection element, for performing spatial differential calculation on the interference signal to generate a demodulation image of the test sample.

Abstract: An optical probe for detecting a biological tissue includes a surface imaging module and a tomography capturing module. The surface imaging module captures and creates a surface image of the biological tissue, and at least includes a light source emitting a first detecting light. The tomography capturing module captures a tomography image of the biological tissue and receives a second detecting light. The first detecting light passes via a first optical path from the light source to an imaging sensor through the biological tissue, a telecentric lens, a first optical mirror, and a lens assembly in sequence. The second detecting light passes via a second optical path from a first collimator to the first collimator through a scanner, the first optical mirror, the telecentric lens, the biological tissue, the telecentric lens, the first optical mirror, the scanner, and the first collimator in sequence.

Abstract: An exposure system including a first laser light source, a second laser light source, a focusing module, an astigmatism generating element, and a photo detector, and an adjustment method thereof are provided. The first laser light source emits a first laser beam. The second laser light source emits a second laser beam. The focusing module includes a light converging unit disposed on transmission paths of the first laser beam and the second laser beam for projecting the first laser beam and the second laser beam onto a material. The material reflects at least a part of the first laser beam into a first reflective beam. The light converging unit and the astigmatism generating element are disposed on the transmission path of the first reflective beam. The photo detector is disposed on the transmission path of the first reflective beam from the astigmatism generating element.