Patents by Inventor Shuh-Chwen Yeh

Shuh-Chwen Yeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for filtering statistical process data to enhance process performance
    Patent number: 7200523
    Abstract: A data filter for filtering process data to a statistical control model is provided to enhance the performance of the control model. The data filter selects a set of template data from a set of statistical process data. A set of grids is formed comprising the set of template data and a set of sample data and an absolute distance is calculated between each point of a grid in the set of grids and a minimum accumulated distance of a point of the grid is calculated using the absolute distance. A global optimal path is identified based on the minimum accumulated distance of the point, and a set of sample data is remapped to form a set of warped data based on the global optimal path and the set of reference data.
    Type: Grant
    Filed: November 30, 2005
    Date of Patent: April 3, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shuh-Chwen Yeh, Chun-Hsien Lin