Abstract: A cryopump system includes a plurality of cryopumps, each cryopump including a rough valve connecting the cryopump to a common rough pump and a pressure sensor measuring a pressure in the cryopump, and a controller that controls, for each cryopump, the rough valve based on a measured pressure from the pressure sensor such that the cryopump is decompressed to a first reference pressure by the common rough pump and thereafter a vacuum is maintained in the cryopump, and the cryopump is further decompressed to a second reference pressure lower than the first reference pressure by the common rough pump. The controller is configured to, based on the measured pressure from the pressure sensor of a first cryopump, open the rough valve of a second cryopump such that the second cryopump is decompressed to the first reference pressure while the vacuum is maintained in the first cryopump.

Abstract: A cryopump includes: a cryopump container including a container body defining a cryopump intake port and extending axially and tubularly from the cryopump intake port, and a cryocooler accommodation cylinder connected to a side portion of the container body and extending transversely; a cryocooler fixed to the cryocooler accommodation cylinder and extending transversely within the cryopump container; a plurality of cryopanels thermally coupled to the second cooling stage of the cryocooler, capable of adsorbing a non-condensable gas, and axially arranged between the cryopump intake port and a bottom portion of the container body; and a purge gas inlet installed in the container body below the cryocooler accommodation cylinder to blow a purge gas to a distal portion of at least one of the cryopanels.

Abstract: A cryopump includes: a cryocooler which includes a high-temperature cooling stage and a low-temperature cooling stage; a radiation shield which surrounds the low-temperature cooling stage, extends in an axial direction, and is thermally coupled to the high-temperature cooling stage; a plurality of adsorption cryopanels which are disposed between a cryopump intake port and the low-temperature cooling stage in the axial direction and are thermally coupled to the low-temperature cooling stage; and a condensation cryopanel which is disposed between the radiation shield and the plurality of adsorption cryopanels in a radial direction, is thermally coupled to the low-temperature cooling stage, and has a tubular shape extending in the axial direction and being open at both ends.

Abstract: A cryopump includes: a cryocooler which includes a high-temperature cooling stage and a low-temperature cooling stage; a radiation shield which surrounds the low-temperature cooling stage, extends in an axial direction, and is thermally coupled to the high-temperature cooling stage; a plurality of adsorption cryopanels which are disposed between a cryopump intake port and the low-temperature cooling stage in the axial direction and are thermally coupled to the low-temperature cooling stage; and a condensation cryopanel which is disposed between the radiation shield and the plurality of adsorption cryopanels in a radial direction, is thermally coupled to the low-temperature cooling stage, and has a tubular shape extending in the axial direction and being open at both ends.