Abstract: A transport system including a load table with an index and a traveling body configured to transport an object placed on the load table. The traveling body includes a memory, an environment detector, and circuitry. The memory is configured to store map information including a position of the load table and self-position information indicating a position of the traveling body. The environment detector is configured to detect the index and acquire data indicating a relative position between the index and the traveling body. The circuitry is configured to update the self-position information based on the relative position and the map information.

Abstract: This invention relates to a method for sublimation refining which gives a high-purity product in high yield while preventing corrosion of the apparatus, contamination of the product and change in quality of the product and to an apparatus useful for the method. The apparatus of this invention for sublimation refining comprises a heat generating unit made of a material generating heat by electromagnetic induction, sublimating unit A and collecting units B and C, respectively independently controllable in temperature by electromagnetic induction heating and the inner surface or the inner tube of the sublimating or collecting unit is made of a material like metal and ceramic inert to sublimable substances.

Abstract: This invention relates to a method for sublimation refining which gives a high-purity product in high yield while preventing corrosion of the apparatus, contamination of the product and change in quality of the product and to an apparatus useful for the method. The apparatus of this invention for sublimation refining comprises a heat generating unit made of a material generating heat by electromagnetic induction, sublimating unit A and collecting units B and C, respectively independently controllable in temperature by electromagnetic induction heating and the inner surface or the inner tube of the sublimating or collecting unit is made of a material like metal and ceramic inert to sublimable substances.