Patents by Inventor Shui-Yen Lu

Shui-Yen Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210249529
    Abstract: A method for fabricating high electron mobility transistor (HEMT) includes the steps of: forming a buffer layer on a substrate; forming a patterned mask on the buffer layer; using the patterned mask to remove the buffer layer for forming ridges and a damaged layer on the ridges; removing the damaged layer; forming a barrier layer on the ridges; and forming a p-type semiconductor layer on the barrier layer.
    Type: Application
    Filed: March 4, 2020
    Publication date: August 12, 2021
    Inventors: Po-Wen Su, Ming-Hua Chang, Shui-Yen Lu
  • Patent number: 10505007
    Abstract: A semiconductor device includes a metal gate on a substrate, in which the metal gate includes a first work function metal (WFM) layer and the first WFM layer further includes a first vertical portion, a second vertical portion, wherein the first vertical portion and the second vertical portion comprise different heights, and a first horizontal portion connecting the first vertical portion and the second vertical portion.
    Type: Grant
    Filed: September 17, 2018
    Date of Patent: December 10, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Wen Su, Wen-Yen Huang, Kuan-Ying Lai, Shui-Yen Lu
  • Patent number: 10177245
    Abstract: A method of fabricating a semiconductor device is disclosed. A substrate is provided. A dummy gate stack is formed on the substrate. The dummy gate stack includes a gate dielectric layer and an amorphous silicon dummy gate on the gate dielectric layer. The amorphous silicon dummy gate is transformed into a nano-crystalline silicon dummy gate. A spacer is formed on a sidewall of the nano-crystalline silicon dummy gate. A source/drain region is formed in the substrate on either side of the dummy gate stack.
    Type: Grant
    Filed: July 26, 2017
    Date of Patent: January 8, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Wen Su, Shui-Yen Lu
  • Patent number: 10170624
    Abstract: A non-planar transistor is provided. It includes a substrate, a fin structure, a gate structure, a first spacer structure and a source/drain region. The fin structure is disposed on the substrate, the gate structure is disposed on the fin structure. The fin structure includes an upper portion, a concave portion and a lower portion, and the concave portion is disposed between the upper portion and the lower portion. The first spacer structure is disposed on a sidewall of the gate structure. The first spacer structure includes a first spacer and a second spacer, wherein the first spacer is disposed between the second spacer, and a height of the first spacer is different from a height of the second spacer. The source/drain region is disposed in a semiconductor layer at two sides of the first spacer structure.
    Type: Grant
    Filed: March 2, 2017
    Date of Patent: January 1, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Jhen-Cyuan Li, Nan-Yuan Huang, Shui-Yen Lu
  • Patent number: 10128366
    Abstract: A semiconductor device includes a semiconductor substrate, a gate structure formed over the semiconductor substrate, and an epitaxial structure formed partially within the semiconductor substrate. The gate structure includes a gate dielectric layer formed over the semiconductor substrate, a gate electrode formed over the gate dielectric layer, and a spacer formed on side surfaces of the gate dielectric layer and the gate electrode. A laterally extending portion of the epitaxial structure extends laterally at an area below a top surface of the semiconductor substrate in a direction toward an area below the gate structure. A lateral end of the laterally extending portion is below the spacer.
    Type: Grant
    Filed: February 6, 2018
    Date of Patent: November 13, 2018
    Assignee: UNITED MICROELECTRONICS CORPORATION
    Inventors: Yu-Ying Lin, Kuan Hsuan Ku, I-Cheng Hu, Chueh-Yang Liu, Shui-Yen Lu, Yu Shu Lin, Chun Yao Yang, Yu-Ren Wang, Neng-Hui Yang
  • Patent number: 10043882
    Abstract: A method of forming a semiconductor device includes the following steps. A substrate is provided, and the substrate has a first region. A barrier layer is then formed on the first region of the substrate. A first work function layer is formed on the barrier layer. An upper half portion of the first work function layer is converted into a non-volatile material layer. The non-volatile material layer is removed and a lower half portion of the first work function layer is kept.
    Type: Grant
    Filed: January 8, 2018
    Date of Patent: August 7, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Wen Su, Zhen Wu, Hsiao-Pang Chou, Chiu-Hsien Yeh, Shui-Yen Lu, Jian-Wei Chen
  • Publication number: 20180158943
    Abstract: A semiconductor device includes a semiconductor substrate, a gate structure formed over the semiconductor substrate, and an epitaxial structure formed partially within the semiconductor substrate. The gate structure includes a gate dielectric layer formed over the semiconductor substrate, a gate electrode formed over the gate dielectric layer, and a spacer formed on side surfaces of the gate dielectric layer and the gate electrode. A laterally extending portion of the epitaxial structure extends laterally at an area below a top surface of the semiconductor substrate in a direction toward an area below the gate structure. A lateral end of the laterally extending portion is below the spacer.
    Type: Application
    Filed: February 6, 2018
    Publication date: June 7, 2018
    Inventors: Yu-Ying Lin, Kuan Hsuan KU, I-Cheng Hu, Chueh-Yang Liu, Shui-Yen Lu, Yu Shu LIN, Chun Yao YANG, Yu-Ren Wang, Neng-Hui Yang
  • Publication number: 20180151685
    Abstract: A method of forming a semiconductor device includes the following steps. A substrate is provided, and the substrate has a first region. A barrier layer is then formed on the first region of the substrate. A first work function layer is formed on the barrier layer. An upper half portion of the first work function layer is converted into a non-volatile material layer. The non-volatile material layer is removed and a lower half portion of the first work function layer is kept.
    Type: Application
    Filed: January 8, 2018
    Publication date: May 31, 2018
    Inventors: Po-Wen Su, Zhen Wu, Hsiao-Pang Chou, Chiu-Hsien Yeh, Shui-Yen Lu, Jian-Wei Chen
  • Patent number: 9978854
    Abstract: An etching method adapted to forming grooves in Si-substrate and FinFET transistor manufactured thereof are provided. The etching method includes providing a silicon substrate, at least two gate structures formed on the silicon substrate and at least two gate spacer structures disposed on the silicon substrate; performing a first etching process on the silicon substrate to form a first groove, which has a base and two inclined sidewalls, ascending to respective bottoms of the gate structures, and are interconnected with the base, respectively; and performing a second etching process on the silicon substrate at the base of the first groove, so as to form a second groove in a trench shape, wherein the two inclined sidewalls of the first groove are interconnected with the second groove respectively, and the first etching process is substantially different from the second etching process.
    Type: Grant
    Filed: May 17, 2016
    Date of Patent: May 22, 2018
    Assignee: UNITED MICROELECTRONICS CORPORATION
    Inventors: Jhen-Cyuan Li, Shui-Yen Lu, Man-Ling Lu, Yu-Cheng Tung, Chung-Fu Chang
  • Patent number: 9929264
    Abstract: A semiconductor device includes a semiconductor substrate, a gate structure formed over the semiconductor substrate, and an epitaxial structure formed partially within the semiconductor substrate. A vertically extending portion of the epitaxial structure extends vertically above a top surface of the semiconductor substrate in an area adjacent the gate structure. A laterally extending portion of the epitaxial structure extends laterally at an area below the top surface of the semiconductor substrate in a direction toward an area below the gate structure and beyond an area where the epitaxial structure extends vertically. The device further includes an interlayer dielectric layer between a side surface of the vertically extending portion of the epitaxial structure and a side surface of the gate structure. A top surface of the laterally extending portion of the epitaxial structure directly contacts the interlayer dielectric layer.
    Type: Grant
    Filed: June 20, 2017
    Date of Patent: March 27, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yu-Ying Lin, Kuan Hsuan Ku, I-Cheng Hu, Chueh-Yang Liu, Shui-Yen Lu, Yu Shu Lin, Chun Yao Yang, Yu-Ren Wang, Neng-Hui Yang
  • Patent number: 9899491
    Abstract: A semiconductor device and a method of forming the same, the semiconductor device include a substrate, and a first gate structure and a second gate structure disposed on the substrate. The first gate structure includes a barrier layer, a first work function layer, a second work function layer and a conductive layer stacked one over another on the substrate. The second gate structure includes the barrier layer, a portion of the first work function layer and the conductive layer stacked one over another on the substrate, wherein the portion of the first work function layer has a smaller thickness than a thickness of the first work function layer.
    Type: Grant
    Filed: June 15, 2016
    Date of Patent: February 20, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Wen Su, Zhen Wu, Hsiao-Pang Chou, Chiu-Hsien Yeh, Shui-Yen Lu, Jian-Wei Chen
  • Publication number: 20180033874
    Abstract: A method of fabricating a semiconductor device is disclosed. A substrate is provided. A dummy gate stack is formed on the substrate. The dummy gate stack includes a gate dielectric layer and an amorphous silicon dummy gate on the gate dielectric layer. The amorphous silicon dummy gate is transformed into a nano-crystalline silicon dummy gate. A spacer is formed on a sidewall of the nano-crystalline silicon dummy gate. A source/drain region is formed in the substrate on either side of the dummy gate stack.
    Type: Application
    Filed: July 26, 2017
    Publication date: February 1, 2018
    Inventors: Po-Wen Su, Shui-Yen Lu
  • Publication number: 20170365703
    Abstract: A semiconductor device includes a semiconductor substrate, a gate structure formed over the semiconductor substrate, and an epitaxial structure formed partially within the semiconductor substrate. A vertically extending portion of the epitaxial structure extends vertically above a top surface of the semiconductor substrate in an area adjacent the gate structure. A laterally extending portion of the epitaxial structure extends laterally at an area below the top surface of the semiconductor substrate in a direction toward an area below the gate structure and beyond an area where the epitaxial structure extends vertically. The device further includes an interlayer dielectric layer between a side surface of the vertically extending portion of the epitaxial structure and a side surface of the gate structure. A top surface of the laterally extending portion of the epitaxial structure directly contacts the interlayer dielectric layer.
    Type: Application
    Filed: June 20, 2017
    Publication date: December 21, 2017
    Inventors: Yu-Ying LIN, Kuan Hsuan KU, I-Cheng HU, Chueh-Yang LIU, Shui-Yen LU, Yu Shu LIN, Chun Yao YANG, Yu-Ren WANG, Neng-Hui YANG
  • Publication number: 20170338327
    Abstract: A semiconductor device and a manufacturing method thereof, the semiconductor device includes two gate structures and an epitaxial structure. The two gate structures are disposed on a substrate. The epitaxial structure is disposed in the substrate between the gate structures, wherein a protruding portion of the substrate extends into the epitaxial structure in a protection direction.
    Type: Application
    Filed: June 19, 2016
    Publication date: November 23, 2017
    Inventors: Sheng-Hsu Liu, Jhen-Cyuan Li, Shui-Yen Lu
  • Publication number: 20170330952
    Abstract: A semiconductor device and a method of forming the same, the semiconductor device include a substrate, and a first gate structure and a second gate structure disposed on the substrate. The first gate structure includes a barrier layer, a first work function layer, a second work function layer and a conductive layer stacked one over another on the substrate. The second gate structure includes the barrier layer, a portion of the first work function layer and the conductive layer stacked one over another on the substrate, wherein the portion of the first work function layer has a smaller thickness than a thickness of the first work function layer.
    Type: Application
    Filed: June 15, 2016
    Publication date: November 16, 2017
    Inventors: Po-Wen Su, Zhen Wu, Hsiao-Pang Chou, Chiu-Hsien Yeh, Shui-Yen Lu, Jian-Wei Chen
  • Patent number: 9761697
    Abstract: A semiconductor device comprises a substrate, a gate structure and a gate spacer. The substrate has a semiconductor fin protruding from a surface of the substrate. The gate structure is disposed on the semiconductor fin. The gate spacer is disposed on sidewalls of the gate structure, wherein the gate spacer comprises a first material layer and a second material layer stacked with each other and both of these two material layers are directly in contact with the gate structure.
    Type: Grant
    Filed: June 29, 2016
    Date of Patent: September 12, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Jhen-Cyuan Li, Shui-Yen Lu
  • Patent number: 9755057
    Abstract: A method of fabricating a semiconductor device is disclosed. A substrate is provided. A dummy gate stack is formed on the substrate. The dummy gate stack includes a gate dielectric layer and an amorphous silicon dummy gate on the gate dielectric layer. The amorphous silicon dummy gate is transformed into a nano-crystalline silicon dummy gate. A spacer is formed on a sidewall of the nano-crystalline silicon dummy gate. A source/drain region is formed in the substrate on either side of the dummy gate stack.
    Type: Grant
    Filed: July 28, 2016
    Date of Patent: September 5, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Wen Su, Shui-Yen Lu
  • Publication number: 20170243954
    Abstract: A method of forming a FinFET device includes following steps. First of all, a fin shaped structure is formed on a substrate. Then, a portion of the fin shaped structure is removed to form a first trench in the fin shaped structure. Next, a cover film is formed to partially cover surfaces of the first trench and to expose a portion of the fin shaped structure. Afterward, the exposed portion of the fin shaped structure is further removed to form a second trench under the first trench. Finally, a barrier layer is formed on surfaces of the second trench, thereby improving the current leakage issues.
    Type: Application
    Filed: February 19, 2016
    Publication date: August 24, 2017
    Inventors: Jhen-Cyuan Li, Sheng-Hsu Liu, Shui-Yen Lu
  • Patent number: 9716165
    Abstract: A semiconductor device includes a semiconductor substrate, a gate structure formed over the semiconductor substrate, and an epitaxial structure formed partially within the semiconductor substrate. A vertically extending portion of the epitaxial structure extends vertically above a top surface of the semiconductor substrate in an area adjacent the gate structure. A laterally extending portion of the epitaxial structure extends laterally at an area below the top surface of the semiconductor substrate in a direction toward an area below the gate structure and beyond an area where the epitaxial structure extends vertically. The device further includes an interlayer dielectric layer between a side surface of the vertically extending portion of the epitaxial structure and a side surface of the gate structure. A top surface of the laterally extending portion of the epitaxial structure directly contacts the interlayer dielectric layer.
    Type: Grant
    Filed: June 21, 2016
    Date of Patent: July 25, 2017
    Assignee: United Microelectronics Corporation
    Inventors: Yu-Ying Lin, Kuan Hsuan Ku, I-Cheng Hu, Chueh-Yang Liu, Shui-Yen Lu, Yu Shu Lin, Chun Yao Yang, Yu-Ren Wang, Neng-Hui Yang
  • Publication number: 20170179292
    Abstract: A non-planar transistor is provided. It includes a substrate, a fin structure, a gate structure, a first spacer structure and a source/drain region. The fin structure is disposed on the substrate, the gate structure is disposed on the fin structure. The fin structure includes an upper portion, a concave portion and a lower portion, and the concave portion is disposed between the upper portion and the lower portion. The first spacer structure is disposed on a sidewall of the gate structure. The first spacer structure includes a first spacer and a second spacer, wherein the first spacer is disposed between the second spacer, and a height of the first spacer is different from a height of the second spacer. The source/drain region is disposed in a semiconductor layer at two sides of the first spacer structure.
    Type: Application
    Filed: March 2, 2017
    Publication date: June 22, 2017
    Inventors: Jhen-Cyuan Li, Nan-Yuan Huang, Shui-Yen Lu