Abstract: A distorted substrate is positioned in a predetermined position and corrected, thereby improving the substrate transfer efficiency. A transport unit capable of transporting and positioning a substrate includes a transport mechanism for transporting the substrate to an unloading position, and a positioning mechanism for positioning the substrate in the unloading position. The positioning mechanism includes a regulating member including at least two pairs of regulating portions capable of abutting against the opposing end faces of the substrate, an abutment moving mechanism for moving one regulating portion toward the other regulating portion in each of the at least two pairs of regulating portions, and a regulation moving mechanism capable of moving the regulating member in a direction in which the substrate is pressed.

Abstract: A holding nozzle sucking and holding a work by a negative pressure, comprising: a sucking member; a supporting member; and a biasing member, wherein the supporting member includes a first stop portion and a second stop portion for respectively defining a forward limit and a backward limit of the forward-and-backward movement of the sucking member.

Abstract: A distorted substrate is positioned in a predetermined position and corrected, thereby improving the substrate transfer efficiency. A transport unit capable of transporting and positioning a substrate includes a transport mechanism for transporting the substrate to an unloading position, and a positioning mechanism for positioning the substrate in the unloading position. The positioning mechanism includes a regulating member including at least two pairs of regulating portions capable of abutting against the opposing end faces of the substrate, an abutment moving mechanism for moving one regulating portion toward the other regulating portion in each of the at least two pairs of regulating portions, and a regulation moving mechanism capable of moving the regulating member in a direction in which the substrate is pressed.

Abstract: A holding nozzle sucking and holding a work by a negative pressure, comprising: a sucking member; a supporting member; and a biasing member, wherein the supporting member includes a first stop portion and a second stop portion for respectively defining a forward limit and a backward limit of the forward-and-backward movement of the sucking member.

Abstract: This invention provides a transfer method of transferring, from a carrier including a placing portion on which a substrate is placed, and a cover that is superposed on the upper surface of the placing portion in close contact, the substrate held between the placing portion and the cover. The transfer method includes a holding step of holding the substrate and the cover on the placing portion by a holding apparatus, and a moving step of moving the holding apparatus to move the substrate and the cover from the placing portion to a transfer destination. In the holding step, the cover is held by the cover holding unit of the holding apparatus, and the substrate is held by the substrate holding unit of the holding apparatus in parallel postures of the cover and substrate.

Abstract: This invention provides a transfer method of transferring, from a carrier including a placing portion on which a substrate is placed, and a cover that is superposed on the upper surface of the placing portion in close contact, the substrate held between the placing portion and the cover. The transfer method includes a holding step of holding the substrate and the cover on the placing portion by a holding apparatus, and a moving step of moving the holding apparatus to move the substrate and the cover from the placing portion to a transfer destination. In the holding step, the cover is held by the cover holding unit of the holding apparatus, and the substrate is held by the substrate holding unit of the holding apparatus in parallel postures of the cover and substrate.

Abstract: Variable swirl intake apparatus (24) controls a swirl of intake air in cylinder chamber (22) of an engine.

Abstract: Variable swirl intake apparatus 24 controls a swirl of intake air in cylinder chamber 22 of an engine. Variable swirl intake apparatus 24 has intake port 25 which has entrance portion 25a formed on cylinder head 23 of the engine and extending from the side surface of cylinder head 23 and swirl chamber 25b which communicates with entrance portion 25a and is formed to provide a swirl to a gas flow flowing from entrance portion 25a, intake valve 26, arranged on the lower surface of cylinder head 23, for opening/closing between swirl chamber 25b and cylinder chamber 22 of the engine, swirl control path 28, one end of which is open to swirl chamber 25a on the side of entrance portion 25a with respect to a line connecting the axis along a piston sliding direction at the center of cylinder chamber 22 and the axis of the intake valve, and the other end of which is open to the side surface of cylinder head 23, and a control apparatus 29 for controlling a gas flow into swirl control path 28.