Patents by Inventor Shuichi TAMADA

Shuichi TAMADA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190119523
    Abstract: Provided are a polishing composition, in which oxidation of magnetic particles hardly occurs, and a magnetic polishing method. The polishing composition (1) contains magnetic particles, an antioxidant for suppressing oxidation of the magnetic particles, and water. A magnetic field is applied to the polishing composition (1) to form a magnetic cluster (3) that contains the magnetic particles, and the magnetic cluster (3) is brought into contact with an object (5) to be polished, to polish the object (5) to be polished.
    Type: Application
    Filed: March 23, 2017
    Publication date: April 25, 2019
    Applicant: FUJIMI INCORPORATED
    Inventors: Shuichi TAMADA, Hitoshi MORINAGA, Shota HISHIDA, Daisuke YASUI
  • Patent number: 9816010
    Abstract: A polishing composition of the present invention is to be used for polishing an object including a portion containing a high-mobility material and a portion containing a silicon material. The polishing composition comprises an oxidizing agent and abrasive grains having an average primary particle diameter of 40 nm or less. The polishing composition preferably further contains a hydrolysis-suppressing compound that bonds to a surface OH group of the portion containing a silicon material of the object to function to suppress hydrolysis of the portion containing a silicon material. Alternatively, a polishing composition of the present invention contains abrasive grains, an oxidizing agent, and a hydrolysis-suppressing compound. The polishing composition preferably has a neutral pH.
    Type: Grant
    Filed: June 11, 2015
    Date of Patent: November 14, 2017
    Assignee: FUJIMI INCORPORATED
    Inventors: Shuugo Yokota, Yasuyuki Yamato, Satoru Yarita, Tomohiko Akatsuka, Shuichi Tamada
  • Publication number: 20170275498
    Abstract: Provided is a polishing composition which is suitable for polishing an object of polishing having a layer containing a high mobility material that has higher carrier mobility than Si, suppresses excessive dissolution of the layer containing a high mobility material, and is capable of efficient polishing. Disclosed is a polishing composition that is used for polishing an object of polishing having a layer containing a high mobility material that has higher carrier mobility than Si, the polishing composition including abrasive grains and at least one salt compound selected from the group consisting of a salt of a monovalent acid, a salt of a divalent acid, a salt of a trivalent acid, and a halide salt, in which the electrical conductivity is 1 mS/cm or higher, and a content of hydrogen peroxide is less than 0.1% by mass.
    Type: Application
    Filed: September 28, 2015
    Publication date: September 28, 2017
    Applicant: FUJIMI INCORPORATED
    Inventors: Shuichi TAMADA, Masaki TADA
  • Patent number: 9688884
    Abstract: A polishing composition of the present invention is to be used for polishing an object including a portion containing a high-mobility material and a portion containing a silicon material. The polishing composition comprises odd-shaped abrasive grains and an oxidizing agent having a standard electrode of 0.3 V or more, and preferably further contains a salt, such as an ammonium salt. The pH of the polishing composition is 1 or more and 6 or less, or 8 or more and 14 or less. The average degree of association of the abrasive grains, obtained by dividing the value of the average secondary particle diameter of the abrasive grains by the value of the average primary particle diameter of the abrasive grains, is preferably 1.6 or more.
    Type: Grant
    Filed: November 21, 2012
    Date of Patent: June 27, 2017
    Assignee: FUJIMI INCORPORATED
    Inventors: Shuugo Yokota, Yasuyuki Yamato, Satoru Yarita, Tomohiko Akatsuka, Shuichi Tamada
  • Publication number: 20170081553
    Abstract: The present invention provides a polishing composition suitable for polishing of a polishing object having a layer containing a Group IV material, the polishing composition making it possible to prevent the dissolution of the Group IV material. The present invention is a polishing composition which contains an oxidizing agent containing a halogen atom and an organic compound containing an amide bond.
    Type: Application
    Filed: February 26, 2015
    Publication date: March 23, 2017
    Applicant: FUJIMI INCORPORATED
    Inventor: Shuichi TAMADA
  • Publication number: 20160215170
    Abstract: The present invention provides a polishing composition having excellent storage stability. The present invention relates to a polishing composition including abrasive grains and an oxidant containing a halogen atom, a value (A/B) obtained by dividing the total number (A) (unit: number) of silanol groups contained in the abrasive grains in the polishing composition by a concentration (B) (unit: % by mass) of the oxidant in the polishing composition being 8×1023 or less.
    Type: Application
    Filed: September 2, 2014
    Publication date: July 28, 2016
    Applicant: FUJIMI INCORPORATED
    Inventor: Shuichi TAMADA
  • Patent number: 9376594
    Abstract: There is provided a polishing composition capable of suppressing formation of a stepped portion caused by etching of a surface of a polishing object including a portion containing a group IV material when the polishing object is polished. The present invention relates to a polishing composition for polishing of a polishing object including a portion that contains a group IV material, and the polishing composition contains an oxidizing agent and an anticorrosive agent. Preferably, the anticorrosive agent includes at least one selected from the group consisting of compounds in which two or more carbonyl groups contained in a molecule are bonded through a carbon atom in the molecule. To be more specific, preferably, the anticorrosive agent includes at least one selected from the group consisting of a 1,3-diketone compound, a 1,4-diketone compound, and a triketone compound.
    Type: Grant
    Filed: March 11, 2013
    Date of Patent: June 28, 2016
    Assignee: FUJIMI INCORPORATED
    Inventors: Shuichi Tamada, Satoru Yarita
  • Publication number: 20160136784
    Abstract: A polishing composition contains a polishing accelerator, a water-soluble polymer including a constitutional unit originating from a polymerizable compound having a guanidine structure such as dicyandiamide, and an oxidant. The water-soluble polymer may be a water-soluble polymer including a constitutional unit originating from dicyandiamide and a constitutional unit originating from formaldehyde, a diamine or a polyamine.
    Type: Application
    Filed: January 22, 2016
    Publication date: May 19, 2016
    Applicant: Fujimi Incorporated
    Inventors: Tatsuhiko HIRANO, Shuichi TAMADA, Takahiro UMEDA
  • Patent number: 9238755
    Abstract: A polishing composition of the present invention is to be used for polishing an object including a portion containing a high-mobility material and a portion containing a silicon material. The polishing composition comprises an oxidizing agent and abrasive grains having an average primary particle diameter of 40 nm or less. The polishing composition preferably further contains a hydrolysis-suppressing compound that bonds to a surface OH group of the portion containing a silicon material of the object to function to suppress hydrolysis of the portion containing a silicon material. Alternatively, a polishing composition of the present invention contains abrasive grains, an oxidizing agent, and a hydrolysis-suppressing compound. The polishing composition preferably has a neutral pH.
    Type: Grant
    Filed: November 21, 2012
    Date of Patent: January 19, 2016
    Assignee: FUJIMA INCORPORATED
    Inventors: Shuugo Yokota, Yasuyuki Yamato, Satoru Yarita, Tomohiko Akatsuka, Shuichi Tamada
  • Publication number: 20150287609
    Abstract: A polishing composition of the present invention is to be used for polishing an object including a portion containing a high-mobility material and a portion containing a silicon material. The polishing composition comprises an oxidizing agent and abrasive grains having an average primary particle diameter of 40 nm or less. The polishing composition preferably further contains a hydrolysis-suppressing compound that bonds to a surface OH group of the portion containing a silicon material of the object to function to suppress hydrolysis of the portion containing a silicon material. Alternatively, a polishing composition of the present invention contains abrasive grains, an oxidizing agent, and a hydrolysis-suppressing compound. The polishing composition preferably has a neutral pH.
    Type: Application
    Filed: June 11, 2015
    Publication date: October 8, 2015
    Applicant: FUJIMI INCORPORATED
    Inventors: Shuugo YOKOTA, Yasuyuki YAMATO, Satoru YARITA, Tomohiko AKATSUKA, Shuichi TAMADA
  • Patent number: 9117761
    Abstract: A polishing composition contains a water-soluble polymer, a polishing accelerator, and an oxidizing agent. The water-soluble polymer is a polyamide-polyamine polymer having an amine value of 150 mg KOH/1 g·solid or greater.
    Type: Grant
    Filed: August 2, 2011
    Date of Patent: August 25, 2015
    Assignee: FUJIMI INCORPORATED
    Inventors: Shuichi Tamada, Tatsuhiko Hirano, Takahiro Umeda, Kazuya Sumita, Yoshihiro Izawa
  • Publication number: 20150069016
    Abstract: There is provided a polishing composition capable of suppressing formation of a stepped portion caused by etching of a surface of a polishing object including a portion containing a group IV material when the polishing object is polished. The present invention relates to a polishing composition for polishing of a polishing object including a portion that contains a group IV material, and the polishing composition contains an oxidizing agent and an anticorrosive agent. Preferably, the anticorrosive agent includes at least one selected from the group consisting of compounds in which two or more carbonyl groups contained in a molecule are bonded through a carbon atom in the molecule. To be more specific, preferably, the anticorrosive agent includes at least one selected from the group consisting of a 1,3-diketone compound, a 1,4-diketone compound, and a triketone compound.
    Type: Application
    Filed: March 11, 2013
    Publication date: March 12, 2015
    Inventors: Shuichi Tamada, Satoru Yarita
  • Publication number: 20150060400
    Abstract: The present invention provides a polishing composition that can suppress generation of bumps due to etching on a surface of an object to be polished having a germanium material-containing part during the polishing of the object. The polishing composition of the present invention contains abrasive grains, an oxidant and a water-soluble polymer. The water-soluble polymer may be a water-soluble polymer such that 5,000 or more molecules are adsorbed per 1 ?m2 of the surface area of the abrasive grains. Alternatively, the water-soluble polymer may be a compound that reduces the water contact angle of the germanium material-containing part of the object to be polished after the object has been polished by using the polishing composition.
    Type: Application
    Filed: April 9, 2013
    Publication date: March 5, 2015
    Applicant: FUJIMI INCORPORATED
    Inventor: Shuichi Tamada
  • Publication number: 20140342562
    Abstract: A polishing composition of the present invention is to be used for polishing an object including a portion containing a high-mobility material and a portion containing a silicon material. The polishing composition comprises odd-shaped abrasive grains and an oxidizing agent having a standard electrode of 0.3 V or more, and preferably further contains a salt, such as an ammonium salt. The pH of the polishing composition is 1 or more and 6 or less, or 8 or more and 14 or less. The average degree of association of the abrasive grains, obtained by dividing the value of the average secondary particle diameter of the abrasive grains by the value of the average primary particle diameter of the abrasive grains, is preferably 1.6 or more.
    Type: Application
    Filed: November 21, 2012
    Publication date: November 20, 2014
    Inventors: Shuugo Yokota, Yasuyuki Yamato, Satoru Yarita, Tomohiko Akatsuka, Shuichi Tamada
  • Publication number: 20140322913
    Abstract: A polishing composition of the present invention is to be used for polishing an object including a portion containing a high-mobility material and a portion containing a silicon material. The polishing composition comprises an oxidizing agent and abrasive grains having an average primary particle diameter of 40 nm or less. The polishing composition preferably further contains a hydrolysis-suppressing compound that bonds to a surface OH group of the portion containing a silicon material of the object to function to suppress hydrolysis of the portion containing a silicon material. Alternatively, a polishing composition of the present invention contains abrasive grains, an oxidizing agent, and a hydrolysis-suppressing compound. The polishing composition preferably has a neutral pH.
    Type: Application
    Filed: November 21, 2012
    Publication date: October 30, 2014
    Inventors: Shuugo Yokota, Yasuyuki Yamato, Satoru Yarita, Tomohiko Akatsuka, Shuichi Tamada
  • Publication number: 20140014872
    Abstract: Disclosed is a polishing composition containing a pH-lowering substance and a pH-buffering agent. The difference in absolute value between the pH of the polishing composition immediately after adding a 31% by weight hydrogen peroxide solution thereto at 5.16 g per 100 g of the polishing composition and the pH of the polishing composition after leaving to stand for eight days therefrom is 0.5 or less. Also disclosed is another polishing composition containing a pH-lowering substance and a pH-controlling agent. In comparison to the amount of a basic substance in the polishing composition immediately after adding a 31% by weight hydrogen peroxide solution thereto at 5.16 g per 100 ml of the polishing composition, the amount of a basic substance in the polishing composition after leaving to stand for eight days therefrom is increased by no less than 0.1 mM.
    Type: Application
    Filed: March 28, 2012
    Publication date: January 16, 2014
    Applicant: FUJIMI INCORPORATED
    Inventors: Shuichi Tamada, Tatsuhiko Hirano, Yoshihihro Ezawa, Shogo Onishi
  • Publication number: 20130203254
    Abstract: A polishing composition contains a water-soluble polymer, a polishing accelerator, and an oxidizing agent. The water-soluble polymer is a polyamide-polyamine polymer having an amine value of 150 mg KOH/1 g·solid or greater.
    Type: Application
    Filed: August 2, 2011
    Publication date: August 8, 2013
    Applicant: FUJIMI INCORPORATED
    Inventors: Shuichi Tamada, Tatsuhiko Hirano, Takahiro Umeda, Kazuya Sumita, Yoshihiro Izawa
  • Publication number: 20110250754
    Abstract: A polishing composition contains a polishing accelerator, a water-soluble polymer including a constitutional unit originating from a polymerizable compound having a guanidine structure such as dicyandiamide, and an oxidant. The water-soluble polymer may be a water-soluble polymer including a constitutional unit originating from dicyandiamide and a constitutional unit originating from formaldehyde, a diamine or a polyamine.
    Type: Application
    Filed: March 30, 2011
    Publication date: October 13, 2011
    Applicant: FIJIMI INCORPORATED
    Inventors: Tatsuhiko HIRANO, Shuichi TAMADA, Takahiro UMEDA