Patents by Inventor Shuichi Tanimura

Shuichi Tanimura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for fabricating interconnection structure
    Patent number: 4988423
    Abstract: Disclosed is a method for fabricating an interconnection structure comprising a step of depositing an Al or Al alloy film on a dielectric film by a sputtering method improved in step coverage, a step of processing said Al or Al alloy film or a layered metal film thereof with another metal film into a metal line, and a step of depositing a film of high melting point metal or alloy thereof on the top and side surfaces of said line.
    Type: Grant
    Filed: November 3, 1989
    Date of Patent: January 29, 1991
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Hiroshi Yamamoto, Tsutomu Fujita, Takao Kakiuchi, Kousaku Yano, Shuichi Tanimura, Shinji Fujii