Abstract: [Problem to be Solved] To provide a measuring device preferable to enhance capability of pickup processing when picking up each chip of a plate-shaped member individually separated into a form of chips.

Abstract: An alignment apparatus 10 comprises a table 11 which is provided rotatably in a plane, and equipped with a loading plane 12A capable of sucking a wafer W, a shift mechanism 30 that moves the table 11 in the X- and Y-axis directions, and a sensor 50 that detects the position of the peripheral edge of the wafer W. The loading plane 12A is provided so as to come to a position inside the periphery of the wafer W. On the other hand, outside the table 11, a receiving member 15, which is positioned on the generally same plane as the loading plane 12A, is provided, and the receiving member 15 is provided with a plane configuration larger than the wafer W.

Abstract: While a voltage value of the battery detected by a battery voltage-detecting part is less than a predetermined threshold voltage value for determining a low voltage state, a rotation sensor malfunction-detecting part stops calculating a vehicle speed and uses the vehicle speed calculated at a time immediately before a time when a voltage value of a battery becomes less than the threshold voltage value for determining the low voltage state, for detecting malfunction in a rotation sensor.

Abstract: An alignment apparatus 10 comprises a table 11 which is provided rotatably in a plane, and equipped with a loading plane 12A capable of sucking a wafer W, a shift mechanism 30 that moves the table 11 in the X- and Y-axis directions, and a sensor 50 that detects the position of the peripheral edge of the wafer W. The loading plane 12A is provided so as to come to a position inside the periphery of the wafer W. On the other hand, outside the table 11, a receiving member 15, which is positioned on the generally same plane as the loading plane 12A, is provided, and the receiving member 15 is provided with a plane configuration larger than the wafer W.

Abstract: An observation apparatus is equipped with a light-emitting portion for shining light onto an observation object, an image detector for receiving light reflected from or passing through the observation object, a light emission period establisher for establishing a light emission period for the light-emitting portion, and a light emission controller which activates the light-emitting portion to emit light synchronous with a vertical synchronizing signal of the image detector, and which terminates the emission of light from the light-emitting portion after the established light emission period has elapsed.

Abstract: A method of detaching an article (B) from a laminate unit (C), the laminate unit (C) comprising a support plate (A) and, fixed thereto, the article (B), the fixing effected through a pressure sensitive adhesive double coated sheet (1) deformable by heating to thereby exert a peeling effect, which method comprises heating at least one outer part of the laminate unit so that at least part of an outer region of the laminate unit is initially heated up, with other regions heated up later, and detaching the article (B) from the pressure sensitive adhesive double coated sheet (1) in a direction from the outer region toward the other regions. Thus, there are provided a detaching method and a detacher apparatus which enable efficiently detaching an article, such as an extremely thin wafer, having been fixed through a heat shrinkable pressure sensitive adhesive double coated sheet without cracking of the article.

Abstract: Laminate unit C obtained by fixing article B to support plate A through pressure sensitive adhesive double coated sheet 1 capable of being deformed by heating to thereby exert a detachment effect is held between a pair of sandwiching means, the sandwiching means so arranged as to enable interposition of the laminate unit C. The laminate unit C is heated by heating means 7 so that the pressure sensitive adhesive double coated sheet 1 is deformed to thereby reduce an area of contact of the pressure sensitive adhesive double coated sheet 1 with the article B with the result that the article B comes up from the pressure sensitive adhesive double coated sheet 1. Thereafter, the article B is detached from the pressure sensitive adhesive double coated sheet 1.

Abstract: A suction holding device 10 comprises a table 24 on which a wafer holder H is mounted, and suction side conduits 25 connected to the table 24. The table 24 includes a suction plane 28 provided with a plurality of suction holes 27 on its upper side, and a chamber 32 in fluid communication with the suction holes 27. The chamber 32 is arranged such that it is divided into a plurality of cells 37, 38 and 39 each isolated from others, and that, when the wafer holder H is removed from the suction plane 28, air is independently supplied to respective cells 37-39, from the outer side of the table 24 toward the inner side in order.

Abstract: An observation apparatus for observing an observation object is constructed from a light source portion for emitting illumination light, a converging lens for focusing illumination light from the light source portion onto the observation object and a light-receiving portion for receiving light reflected from the observation object, wherein the light source portion includes a first arrangement of at least one light-emitting body provided on the optical axis of the converging lens, a second arrangement of at least one light-emitting body provided near the optical axis so as to shine light onto the observation object at an incidence angle which allows the light source image to completely cover the light-receiving portion (bright field illumination), a third arrangement of at least one light-emitting body provided near the optical axis so as to shine light onto the observation object at an incidence angle which allows the light source image to cover a portion of the light-receiving portion, and a fourth arrangeme

Abstract: A lighting apparatus 1 has a convex lens 11 arranged so that its optical axis is at an angle &thgr; with respect to the normal of an observation portion 3a (e.g., a semiconductor substrate or the like), with a camera 5 arranged in the path of the reflected light rays. When a light-emitting portion 13 is arranged along the optical axis of the lens 11, a bright field illumination takes place. If a knob 29 is turned, the light-emitting portion 13 moves along a ball screw 25, thereby changing the illumination from a bright field illumination to a dark field illumination. When a knob 37 is turned, the light exiting the lens 11 will diverge if the light-emitting portion 13 is moved close to the lens 11, converge if the light-emitting portion 13 is moved far away from the lens 11, and be parallel if the light-emitting portion 13 is positioned at the focal point of the lens 11.

Abstract: A lighting apparatus 1 has a convex lens 11 arranged so that its optical axis is at an angle .theta. with respect to the normal of an observation portion 3a (e.g., a semiconductor substrate or the like), with a camera 5 arranged in the path of the reflected light rays. When a light-emitting portion 13 is arranged along the optical axis of the lens 11, a bright field illumination takes place. If a knob 29 is turned, the light-emitting portion 13 moves along a ball screw 25, thereby changing the illumination from a bright field illumination to a dark field illumination. When a knob 37 is turned, the light exiting the lens 11 will diverge if the light-emitting portion 13 is moved close to the lens 11, converge if the light-emitting portion 13 is moved far away from the lens 11, and be parallel if the light-emitting portion 13 is positioned at the focal point of the lens 11.

Abstract: A shift control apparatus for an automatic transmission provides a normal-temperature shift pattern and a high-temperature shift pattern. The high-temperature shift pattern is selected when a temperature of hydraulic oil for the transmission satisfies a predetermined condition. Once the high-temperature shift pattern has been selected, the apparatus inhibits the switching to the high-temperature shift pattern for a predetermined duration, thereby to avoid an excessively frequent hunting between the shift patterns.

Abstract: A shift control apparatus for an automatic transmission provides a normal-temperature shift pattern and a high-temperature shift pattern. The high-temperature shift pattern is selected when a transmission fluid temperature satisfies a predetermined condition. The switching of the shift pattern is inhibited if the vehicle speed is lower than a predetermined speed, even when the temperature related to the transmission or engine has been judged to be higher than a predetermined temperature.

Abstract: An apparatus is disclosed which prevents occurrence of an engine stalling in a power train of an automotive vehicle, including an engine and a lock-up type automatic transmission. The apparatus is operative during a braking operation of the vehicle and includes an engine controller to perform an idling speed control for the engine, and a transmission controller to perform a lock-up releasing control for releasing the torque converter from the lock-up mode. When the lock-up releasing control is being performed, the engine controller continuously performs the idling speed control and thereby prevents occurrence of engine stalling.