Abstract: First, a stationary electrode layer is formed over a semiconductor substrate and an integrated network is composed in a circuit element area around the stationary electrode layer by electrode wiring forming each circuit element. A spacer is arranged on a passivation film in plural places. A dummy island is formed in an area between the circuit element area and the stationary electrode layer area. Supply potential Vcc is applied to the dummy island and ground potential GND is applied to a P+-type separated area.

Abstract: A stationary electrode layer 12 is formed on a semiconductor substrate 11, and a vibrating diaphragm 16 is disposed on spacers 14. The vibrating diaphragm 16 is placed so as to protrude from an end of the semiconductor substrate 11, and terminal pads 20 to 23 are placed with being exposed from the vibrating diaphragm 16.

Abstract: A stationary electrode layer 12 is formed on a semiconductor substrate 11, and a vibrating diaphragm 16 is disposed on spacers 14. The vibrating diaphragm 16 is placed so as to protrude from an end of the semiconductor substrate 11, and terminal pads 20 to 23 are placed with being exposed from the vibrating diaphragm 16.

Abstract: A fixed electrode layer 12 is formed on a semiconductor substrate 11. A vibrating film is formed on the fixed electrode layer through a spacer 14. Since the vibrating film is a light-permeable film, in order to prevent the malfunction of an electronic circuit formed in the semiconductor substrate by incident light, the region where the electronic circuit is to be formed is covered with a shield metal 33.

Abstract: A stationary electrode layer 12 is formed on a semiconductor substrate 11, and a vibrating diaphragm 16 is disposed on spacers 14. The vibrating diaphragm 16 is placed so as to protrude from an end of the semiconductor substrate 11, and terminal pads 20 to 23 are placed with being exposed from the vibrating diaphragm 16.

Abstract: The sensitive coordinate input device of the present invention adopts a system in which the finger F of the operator is regarded as one electrode, and the electrostatic capacitance is varied depending on the changes in the distances between the finger and another electrode which is separated therefrom via a dielectric. Four electrodes are preferably disposed at regular angular positions. Among the four electrodes, two electrodes, and two electrodes which are located at opposite positions are spaced at intervals, respectively. Across the four electrodes, a sensitive member 15 is laid. The surface of the sensitive member is to be touched with the operator's finger F. The sensitive member is preferably formed by a dielectric having a high dielectric constant, such as a ceramic plate. According to the present invention, the area of sensitive area can easily be increased, and the determination of the cursor position on the screen of the CRT display apparatus can readily be performed.