Patents by Inventor Shuli Cai

Shuli Cai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deflection scanning device with multi-phase winding and deflection scanning system
    Patent number: 10804070
    Abstract: The present invention relates to a deflection scanning device with a multi-phase winding and a deflection scanning system. The deflection scanning device is of an axisymmetric structure, and comprises a ferromagnetic frame and a deflection scanning winding, wherein the inner side of the ferromagnetic frame is longitudinally provided with 2aw wire slots equally distributed along the circumference; and the deflection scanning winding comprises a w-phase winding, wherein the axis of the each phase winding is symmetrically distributed. The deflection scanning system comprises a deflection scanning device, a drive power supply unit and, a central, control unit. The deflection scanning device of the present invention can improve the uniformity of the magnetic induction intensity in the charged particle beam channel, and then reduce the defocusing effect and improve the scanning accuracy.
    Type: Grant
    Filed: July 24, 2019
    Date of Patent: October 13, 2020
    Inventors: Xiaodong Huang, Shouqi Wei, Yujiang Qin, Guokun Zhu, Shuli Cai, Xiang Fei, Guohua Huang, Jianfei Zhang, Yinhong Qin
  • Deflection Scanning Device with Multi-phase Winding and Deflection Scanning System
    Publication number: 20200020503
    Abstract: The present invention relates to a deflection scanning device with a multi-phase winding and a deflection scanning system. The deflection scanning device is of an axisymmetric structure, and comprises a ferromagnetic frame and a deflection scanning winding, wherein the inner side of the ferromagnetic frame is longitudinally provided with 2aw wire slots equally distributed along the circumference; and the deflection scanning winding comprises a w-phase winding, wherein the axis of the each phase winding is symmetrically distributed. The deflection scanning system comprises a deflection scanning device, a drive power supply unit and, a central, control unit. The deflection scanning device of the present invention can improve the uniformity of the magnetic induction intensity in the charged particle beam channel, and then reduce the defocusing effect and improve the scanning accuracy.
    Type: Application
    Filed: July 24, 2019
    Publication date: January 16, 2020
    Inventors: Xiaodong Huang, Shouqi Wei, Yujiang Qin, Guokun Zhu, Shuli Cai, Xiang Fei, Guohua Huang, Jianfei Zhang, Yinhong Qin