Abstract: A method for multi-beam laser scribing of a thin-film solar cell is provided. A laser beam output by a laser is split by an optical path unit or a splitter assembly into multiple sub-beams. The multiple sub-beams are focused by a laser-focusing scribing head assembly to form a laser focus on the thin-film solar cell. The thin-film solar cell is fixed on a bearing platform or clamped by a clamping mechanism, and driven by a drive module to reciprocate in a direction perpendicular to an output direction of the laser-focusing scribing head assembly to create a first scribe line. A position of the laser-focusing scribing head assembly is switched, and the thin-film solar cell is driven to reciprocate again to create a second scribe line. The fume and dust generated during the scribing process are removed through a fume-fume-dust extraction port corresponding to the scribing head assembly.

Abstract: A multi-laser beam focusing and scribing device with following function includes a beam splitter module, a focusing lens module, a first shaft, a diffractive optical element (DOE) beam shaping lens, a second adjustment shaft, a coaxial charge-coupled device (CCD) vision module, and a distance-measuring sensor. The first adjustment shaft is configured to adjust a focus position, and the second adjustment shaft is configured to adjust a spacing between scribed lines, and is electrically-powered. The beam splitter module is configured to split an incident laser beam into a plurality of sub-beams.