Patents by Inventor Shun-Tsai Liu

Shun-Tsai Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for supplying photoresist
    Patent number: 6880724
    Abstract: A photoresist supply system includes a storage bottle and a reservoir coupled in flow communication therewith. A vacuum pump is coupled in flow communication with the reservoir and creates a vacuum within the reservoir that draws photoresist out of the storage bottle and into the reservoir. An inlet into the reservoir is configured to flow photoresist down an inner wall of the reservoir. The photoresist flows out of the reservoir into a dispense reservoir from which the photoresist is pumped to a dispense nozzle for application to a wafer or substrate.
    Type: Grant
    Filed: July 24, 2002
    Date of Patent: April 19, 2005
    Assignee: Macronix International Co., Ltd.
    Inventor: Shun-Tsai Liu