Patents by Inventor Shungo Tsuboi

Shungo Tsuboi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Excimer laser device
    Patent number: 5187716
    Abstract: At least the opposing surface portions of the main electrodes of an excimer laser device are covered with materials which are resistive to chemical etching than nickel. The etching resistive material may be a platinum based alloy containing rhodium, ruthenium, iridium, or osmium; a nickel based alloy containing gold, platinum, rhodium, ruthenium, iridium, or osmium; or rhodium, ruthenium, iridium, or osmium. Thus, an excimer laser device is realized by which the lives of the electrodes and the laser gas are prolonged.
    Type: Grant
    Filed: July 3, 1991
    Date of Patent: February 16, 1993
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Kenyu Haruta, Haruhiko Nagai, Hajime Nakatani, Yoshihiko Yamamoto, Taketoshi Takemura, Takashi Eura, Shungo Tsuboi, Yoshifumi Matsushita, Tadao Minagawa