Abstract: The present invention provides a thin film capacitor which comprises: a carrier substrate; a thin film element provided on the carrier substrate and having an insulating layer and a plurality of electrode layers, the thin film element including areas formed with no insulating layer; and a plurality of external terminals electrically connected to the corresponding electrode layers for receiving electrical signals of different potentials applied thereto, the plurality of external terminals being respectively provided in the areas formed with no insulating layer and bonded to the carrier substrate via the electrode layers connected thereto. The thin film capacitor according to the invention features a sufficient insulating property and a higher break down voltage.