Abstract: A substrate supporting device having a feeder structure that enables a large number of electrodes to be successfully supplied with power. A ceramic heater 100 includes a base 10 having an upper surface as a support surface on which a substrate is supported, electrodes 20 embedded in the base 10, a base-supporting member 30 that is mounted on a lower surface of the base 10 and that is formed of a heat insulating material, and feeder rods 40 that extend through respective through-holes 35 formed in a circumferential wall 34 of the base-supporting member 30 and extending in the vertical direction and that are electrically connected to the electrodes 20.

Abstract: A substrate supporting device having a feeder structure that enables a large number of electrodes to be successfully supplied with power. A ceramic heater 100 includes a base 10 having an upper surface as a support surface on which a substrate is supported, electrodes 20 embedded in the base 10, a base-supporting member 30 that is mounted on a lower surface of the base 10 and that is formed of a heat insulating material, and feeder rods 40 that extend through respective through-holes 35 formed in a circumferential wall 34 of the base-supporting member 30 and extending in the vertical direction and that are electrically connected to the electrodes 20.

Abstract: In a stage member for use in an exposure apparatus, a honeycomb structural body has walls that are extended in a direction perpendicular to a longitudinal direction of the stage member and that surround square shaped prismatic spaces, so as to accomplish a high resistance and a high resonant frequency with respect to torsional vibration. The honeycomb structural body of the stage member is preferably made of a ceramic material.

Abstract: A built-in igniter type high pressure sodium lamp includes an igniter connected in parallel with an arc tube 1 for a high pressure sodium lamp and composed of a series circuit of a thermally-activated bimetal switch 2 and a nonlinear capacitor 3. The high pressure sodium lamp is so constructed that a heating resistor 11 which can heat the nonlinear capacitor 3 to the Curie point temperature when the igniter operates is connected in parallel with and located close to the nonlinear capacitor 3.

Abstract: On a display device, one or more machining portions in the entire working surface of a workpiece are displayed as image variations in gradiation, hue or tone throughout in a direction normal to the axis of the workpiece, to thus facilitate recognition of the machining state. A graphic display system is combined with a numerical control grinding machine to display images of a workpiece being machined and its working surfaces. The workpiece is displayed on the display device as a projection thereof on a plane parallel to the axis of the workpiece. Machining portions in the entire working surface of the workpiece are displayed in gradation, hue or tone changes, throughout in a direction normal to the axis of the workpiece, in accordance with changes in the cut-away amount.

Abstract: A high-pressure metal vapor discharge lamp comprises: an arc tube, which is shunted by a series circuit of a thermal switch and a nonlinear ceramic capacitor, a pyroelectric current bypassing resistor connected in parallel to the nonlinear ceramic capacitor, and a lamp outer bulb incorporating the arc tube, the thermal switch, the nonlinear ceramic capacitor and the resistor. Because of this construction, the nonlinear ceramic capacitor is prevented from early deterioration, thus lengthening the service life of the discharge lamp.

Abstract: There is disclosed a high pressure metal vapor discharge lamp which contains in an outer bulb a starting circuit connected in parallel with a light emitting tube having at least one pair of main electrodes. The starting circuit includes a ceramic capacitor surrounded by glass material and exhibiting a non-linear voltage-charge characteristic.