Abstract: A vacuum drying apparatus and a vacuum drying method are provided wherein it is possible to reduce the drying time of an object to be dried and the surface condition of the object to be dried after drying is extremely satisfactory. A vacuum pump is connected to an exhaust port of a vacuum chamber through a suction pipe, and a frequency converter is provided on the input side of an alternating current motor for driving the vacuum pump to form a vacuum drying apparatus. A substrate coated with coating liquid is placed in the vacuum chamber of the vacuum drying apparatus.

Abstract: Disclosed are a color filter, which can prevent, on a higher level, a liquid crystal layer from being contaminated with ionic materials, and a liquid crystal display device having improved display quality. The color filter comprises at least a substrate and a colored layer of a plurality of colors provided in a predetermined pattern on the substrate, and, after impurity elution, permits a liquid crystal to have a voltage holding ratio of not less than 90%. The liquid crystal display device comprises: this color filter; and a counter electrode substrate provided so as to face the color filter while leaving a gap between the color filter and the counter electrode substrate through a seal member; and a liquid crystal layer sealed into the gap.

Abstract: A vacuum drying apparatus and a vacuum drying method are provided wherein it is possible to reduce the drying time of an object to be dried and the surface condition of the object to be dried after drying is extremely satisfactory. A vacuum pump is connected to an exhaust port of a vacuum chamber through a suction pipe, and a frequency converter is provided on the input side of an alternating current motor for driving the vacuum pump to form a vacuum drying apparatus. A substrate coated with coating liquid is placed in the vacuum chamber of the vacuum drying apparatus.

Abstract: A vacuum drying apparatus and a vacuum drying method are provided wherein it is possible to reduce the drying time of an object to be dried and the surface condition of the object to be dried after drying is extremely satisfactory. A vacuum pump is connected to an exhaust port of a vacuum chamber through a suction pipe, and a frequency converter is provided on the input side of an alternating current motor for driving the vacuum pump to form a vacuum drying apparatus. A substrate coated with coating liquid is placed in the vacuum chamber of the vacuum drying apparatus.

Abstract: Disclosed are a color filter, which can prevent, on a higher level, a liquid crystal layer from being contaminated with ionic materials, and a liquid crystal display device having improved display quality. The color filter comprises at least a substrate and a colored layer of a plurality of colors provided in a predetermined pattern on the substrate, and, after impurity elution, permits a liquid crystal to have a voltage holding ratio of not less than 90%. The liquid crystal display device comprises: this color filter; and a counter electrode substrate provided so as to face the color filter while leaving a gap between the color filter and the counter electrode substrate through a seal member; and a liquid crystal layer sealed into the gap.

Abstract: A vacuum drying apparatus and a vacuum drying method are provided wherein it is possible to reduce the drying time of an object to be dried and the surface condition of the object to be dried after drying is extremely satisfactory. A vacuum pump is connected to an exhaust port of a vacuum chamber through a suction pipe, and a frequency converter is provided on the input side of an alternating current motor for driving the vacuum pump to form a vacuum drying apparatus. A substrate coated with coating liquid is placed in the vacuum chamber of the vacuum drying apparatus.

Abstract: In an apparatus and method for forming an applied layer of a photosensitive resin on a large glass substrate for an LCD color filter, a substrate (S) is suctioned and held by a movable holder (8) with a main surface thereof to be processed oriented downward. The movable holder (8) is at an angle of inclination (.theta.) to the horizontal and is capable of moving along a guide rail (7). An application head (H) having an upward-pointing linear slit (13) through which an application liquid is supplied is provided below a region through which the substrate (S) moves supported by the holder (8). When the substrate (S) having a constant clearance (I.sub.2) with the application head (H) is moved diagonally upward, an application liquid bead (B) is formed between the slit (13) and the downward-pointing main surface of the substrate (S), by surface tension. The application liquid bead (B) is moved gradually diagonally downward along the main surface of the substrate to form an application layer (Ra). A meniscus (L.