Patents by Inventor Shunsuke ASAKURA

Shunsuke ASAKURA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS
    Publication number: 20230295837
    Abstract: There is provided a technique that includes: (a) forming a modified layer by modifying at least a portion of an oxide film of a substrate by performing, a predetermined number of times: (a1) supplying a fluorine-containing gas to the substrate including the oxide film; and (a2) supplying a first reducing gas to the substrate; and (b) supplying the fluorine-containing gas to the substrate after the modified layer is formed.
    Type: Application
    Filed: September 15, 2022
    Publication date: September 21, 2023
    Applicant: Kokusai Electric Corporation
    Inventors: Kaichiro MINAMI, Naonori AKAE, Akito HIRANO, Sadayasu SUYAMA, Takayuki YAMAMOTO, Shunsuke ASAKURA, Yugo ORIHASHI, Yasuhiro MEGAWA