Patents by Inventor Shunsuke Kibayashi

Shunsuke Kibayashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Spatially filtered talbot interferometer for wafer distortion measurement
    Patent number: 12104891
    Abstract: A system for measuring a target grating includes an illumination source, a reference transmission grating, a pupil filter, and a detector. The illumination source is disposed to generate an incident light beam that illuminates the reference transmission grating. The reference transmission grating splits the incident light beam into a plurality of diffraction orders. The plurality of diffraction orders interrogates a target grating. The reference transmission grating and the target grating are parallel. The pupil filter allows transmission of a subset of diffraction orders of light that has been diffracted and/or reflected from the target grating after being split again by passing through the reference transmission grating. The detector takes a measurement of the subset of diffraction orders of light after transmission through the pupil filter.
    Type: Grant
    Filed: August 10, 2020
    Date of Patent: October 1, 2024
    Inventors: Daniel Gene Smith, Goldie Lynne Goldstein, Hidemitsu Toba, Shunsuke Kibayashi, Katsura Otaki, Eric Peter Goodwin