Patents by Inventor Shunsuke Umezawa
Shunsuke Umezawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11384864Abstract: A vacuum pressure proportional control valve placed on a pipe connecting between a reaction vessel and a vacuum pump to control the vacuum pressure in the reaction vessel includes a cylinder provided with a piston chamber, a piston housed in the piston chamber so as to make reciprocal linear movement, a valve seat surface, and a valve element which contacts with or separates from the valve seat surface according to the movement of the piston. A stopper member is provided in the cylinder so that a leading end portion of the stopper member is placed in the piston chamber. The stopper member is configured to move the piston back and forth in a moving direction of the piston by use of an adjusting unit to thereby adjust the position of the leading end portion.Type: GrantFiled: January 21, 2020Date of Patent: July 12, 2022Assignee: CKD CORPORATIONInventors: Yoshiyuki Yamada, Shunsuke Umezawa
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Publication number: 20200248685Abstract: A vacuum pressure proportional control valve placed on a pipe connecting between a reaction vessel and a vacuum pump to control the vacuum pressure in the reaction vessel includes a cylinder provided with a piston chamber, a piston housed in the piston chamber so as to make reciprocal linear movement, a valve seat surface, and a valve element which contacts with or separates from the valve seat surface according to the movement of the piston. A stopper member is provided in the cylinder so that a leading end portion of the stopper member is placed in the piston chamber. The stopper member is configured to move the piston back and forth in a moving direction of the piston by use of an adjusting unit to thereby adjust the position of the leading end portion.Type: ApplicationFiled: January 21, 2020Publication date: August 6, 2020Applicant: CKD CORPORATIONInventors: Yoshiyuki YAMADA, Shunsuke UMEZAWA
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Patent number: 9267614Abstract: An external seal structure in a vacuum valve in which an upper end plate of a partition wall member is held between a valve body and a cylinder cover. An annular seal member for main fluid is placed between the upper end plate and the valve body to prevent material gas from leaking to atmosphere through an abutting section defined by the valve body and the cylinder cover connected in abutting manner. The main-fluid annular seal member is made of perfluoroelastomer. A fluorinated annular seal member made of fluorinated resin is placed between the upper end plate and the valve body and between the main-fluid annular seal member and the abutting section. A leak port communicated with outside air is provided in the valve body to communicate with between a seal point of the main-fluid annular seal member and a seal point of the fluorinated annular seal member.Type: GrantFiled: July 14, 2014Date of Patent: February 23, 2016Assignee: CKD CORPORATIONInventors: Yoshiyuki Yamada, Shunsuke Umezawa
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Publication number: 20150028245Abstract: An external seal structure in a vacuum valve in which an upper end plate of a partition wall member is held between a valve body and a cylinder cover. An annular seal member for main fluid is placed between the upper end plate and the valve body to prevent material gas from leaking to atmosphere through an abutting section defined by the valve body and the cylinder cover connected in abutting manner. The main-fluid annular seal member is made of perfluoroelastomer. A fluorinated annular seal member made of fluorinated resin is placed between the upper end plate and the valve body and between the main-fluid annular seal member and the abutting section. A leak port communicated with outside air is provided in the valve body to communicate with between a seal point of the main-fluid annular seal member and a seal point of the fluorinated annular seal member.Type: ApplicationFiled: July 14, 2014Publication date: January 29, 2015Inventors: Yoshiyuki YAMADA, Shunsuke UMEZAWA
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Patent number: 8794261Abstract: A fluid control system includes a vacuum chamber, a gas supply source to supply gas as a fluid, an exhaust pipe to discharge the fluid from the vacuum chamber, a gas supply pipe to connect the vacuum chamber to the gas supply source, and a pressure sensor to detect an internal pressure of the vacuum chamber. This system further includes a flowmeter placed between the gas supply source and the vacuum chamber, a proportional valve placed between the flowmeter and the vacuum chamber, a pressure controller to control the proportional valve based on output of the pressure sensor, a metering valve placed on the exhaust pipe, and a flow controller to control the metering valve based on an output of the flowmeter.Type: GrantFiled: February 4, 2013Date of Patent: August 5, 2014Assignee: CKD CorporationInventors: Masayuki Watanabe, Yoshiyuki Yamada, Shunsuke Umezawa
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Publication number: 20130255793Abstract: A fluid control system includes a vacuum chamber, a gas supply source to supply gas as a fluid, an exhaust pipe to discharge the fluid from the vacuum chamber, a gas supply pipe to connect the vacuum chamber to the gas supply source, and a pressure sensor to detect an internal pressure of the vacuum chamber. This system further includes a flowmeter placed between the gas supply source and the vacuum chamber, a proportional valve placed between the flowmeter and the vacuum chamber, a pressure controller to control the proportional valve based on output of the pressure sensor, a metering valve placed on the exhaust pipe, and a flow controller to control the metering valve based on an output of the flowmeter.Type: ApplicationFiled: February 4, 2013Publication date: October 3, 2013Applicant: CKD CORPORATIONInventors: Masayuki WATANABE, Yoshiyuki YAMADA, Shunsuke UMEZAWA
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Patent number: 8525045Abstract: A Faraday cage includes a casing structured by a first housing having a first outer cover made of a conductive material, and a first inner cover made of a conductive material, which is accommodated in the first outer cover and is electrically insulated from the first outer cover, and a second housing having a second outer cover made of a conductive material, which fits the first outer cover, and a second inner cover made of a conductive material, which is accommodated in the second outer cover and is electrically insulated from the second outer cover, the first and second housings being separable from each other; and a filter cartridge disposed inside the casing configured to be separable into two pieces, which accommodates therein a first filter for collecting fine particles sucked in from the outside the casing.Type: GrantFiled: June 24, 2009Date of Patent: September 3, 2013Assignee: U-TEC CorporationInventors: Chiseki Yamaguchi, Naoya Hamada, Shunsuke Umezawa, Takuo Wariishi, Tomohiro Kamitani, Naoki Moribe
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Publication number: 20110100701Abstract: A Faraday cage includes a casing structured by a first housing having a first outer cover made of a conductive material, and a first inner cover made of a conductive material, which is accommodated in the first outer cover and is electrically insulated from the first outer cover, and a second housing having a second outer cover made of a conductive material, which fits the first outer cover, and a second inner cover made of a conductive material, which is accommodated in the second outer cover and is electrically insulated from the second outer cover, the first and second housings being separable from each other; and a filter cartridge disposed inside the casing configured to be separable into two pieces, which accommodates therein a first filter for collecting fine particles sucked in from the outside the casing.Type: ApplicationFiled: June 24, 2009Publication date: May 5, 2011Applicant: U-TEC CORPORATIONInventors: Chiseki Yamaguchi, Naoya Hamada, Shunsuke Umezawa, Takuo Wariishi, Tomohiro Kamitani, Naoki Moribe
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Publication number: 20090057600Abstract: A durable vacuum opening/closing valve connectable with a vacuum chamber and a vacuum pump is arranged to control vacuum pressure in the vacuum chamber by changing an opening degree of an O ring serving as a valve element relative to a valve seat. A predetermined clearance between an outer peripheral surface of a piston and an inner peripheral surface of a cylinder is sealed by a bellofram which changes its shape in association with movement of the piston moved to open or close the valve. The bellofram includes an inclined surface with a predetermined inclination angle and the outer periphery of the piston includes an inclined surface with a predetermined inclination angle, so that an inner diameter of the bellofram in contact with the piston and the outer diameter of the piston are equal when the valve element is in contact with the valve seat.Type: ApplicationFiled: August 1, 2008Publication date: March 5, 2009Applicant: CKD CORPORATIONInventors: Masayuki Watanabe, Makoto Miyahara, Shunsuke Umezawa
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Publication number: 20080302427Abstract: A vacuum pressure control system includes a vacuum chamber, a vacuum pump for sucking gas from the vacuum chamber, a vacuum open/close valve for controlling vacuum pressure in the vacuum chamber by changing a opening degree by driving air supplied from an air supply source serving as a power source, a vacuum pressure control device for controlling the vacuum open/close valve, and a servo valve for controlling the opening degree of the vacuum open/close valve.Type: ApplicationFiled: May 6, 2008Publication date: December 11, 2008Applicant: CKD CORPORATIONInventors: Masayuki Watanabe, Makoto Miyahara, Shunsuke Umezawa