Patents by Inventor Shuo-Lun Tu

Shuo-Lun Tu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11742422
    Abstract: A semiconductor device includes: a substrate; a source region and a drain region located in the substrate; a gate structure located in the substrate between the source region and the drain region; an insulating layer located between the gate structure and the drain region; a plurality of field plates located on the insulating layer, wherein the field plate closest to the gate structure is electrically connected to the source region; a first well region located in the substrate; a body contact region located in the first well region, wherein the body contact region is electrically connected to the source region and the field plate closest to the gate structure; and a first doped drift region located in the substrate, wherein the gate structure is located between the first well region and the first doped drift region, and the drain region is located in the first doped drift region.
    Type: Grant
    Filed: September 13, 2021
    Date of Patent: August 29, 2023
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Shuo-Lun Tu, Shyi-Yuan Wu
  • Publication number: 20230081508
    Abstract: A semiconductor device includes: a substrate; a source region and a drain region located in the substrate; a gate structure located in the substrate between the source region and the drain region; an insulating layer located between the gate structure and the drain region; a plurality of field plates located on the insulating layer, wherein the field plate closest to the gate structure is electrically connected to the source region; a first well region located in the substrate; a body contact region located in the first well region, wherein the body contact region is electrically connected to the source region and the field plate closest to the gate structure; and a first doped drift region located in the substrate, wherein the gate structure is located between the first well region and the first doped drift region, and the drain region is located in the first doped drift region.
    Type: Application
    Filed: September 13, 2021
    Publication date: March 16, 2023
    Applicant: MACRONIX International Co., Ltd.
    Inventors: Shuo-Lun Tu, Shyi-Yuan Wu
  • Patent number: 9466700
    Abstract: A lateral drain metal oxide semiconductor (LDMOS) device includes a well region having a second conductive type in a substrate, a body region having a first conductive type in the well region, a drift region having the second conductive type in the well region and spaced apart from the body region, a source region having the second conductive type in the body region, a drain region having the second conductive type in the drift region, a gate structure on the well region between the source region and the drain region, a shallow trench isolation (STI) structure in the drift region between the drain region and the source region, and a buried layer having the first conductive type in the well region under the drift region, a center of the buried layer being aligned with a center of the STI structure.
    Type: Grant
    Filed: December 1, 2015
    Date of Patent: October 11, 2016
    Assignee: Macronix International Co., Ltd.
    Inventors: Jiun-Yan Tsai, Shuo-Lun Tu, Shih-Chin Lien, Shyi-Yuan Wu
  • Patent number: 9302904
    Abstract: A method of fabricating an integrated semiconductor device, comprising: providing a substrate having a first region and a second region; and forming a semiconductor unit on the first region and forming a micro electro mechanical system (MEMS) unit on the second region in one process.
    Type: Grant
    Filed: September 25, 2014
    Date of Patent: April 5, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Hsueh-I Huang, Ming-Tung Lee, Shuo-Lun Tu
  • Publication number: 20160087083
    Abstract: A lateral drain metal oxide semiconductor (LDMOS) device includes a well region having a second conductive type in a substrate, a body region having a first conductive type in the well region, a drift region having the second conductive type in the well region and spaced apart from the body region, a source region having the second conductive type in the body region, a drain region having the second conductive type in the drift region, a gate structure on the well region between the source region and the drain region, a shallow trench isolation (STI) structure in the drift region between the drain region and the source region, and a buried layer having the first conductive type in the well region under the drift region, a center of the buried layer being aligned with a center of the STI structure
    Type: Application
    Filed: December 1, 2015
    Publication date: March 24, 2016
    Inventors: Jiun-Yan TSAI, Shuo-Lun TU, Shih-Chin LIEN, Shyi-Yuan WU
  • Patent number: 9269806
    Abstract: A lateral drain metal oxide semiconductor (LDMOS) device includes a well region having a second conductive type in a substrate, a body region having a first conductive type in the well region, a drift region having the second conductive type in the well region and spaced apart from the body region, a source region having the second conductive type in the body region, a drain region having the second conductive type in the drift region, a gate structure on the well region between the source region and the drain region, a shallow trench isolation (STI) structure in the drift region between the drain region and the source region, and a buried layer having the first conductive type in the well region under the drift region, a center of the buried layer being aligned with a center of the STI structure.
    Type: Grant
    Filed: October 3, 2013
    Date of Patent: February 23, 2016
    Assignee: Macronix International Co., Ltd.
    Inventors: Jiun-Yan Tsai, Shuo-Lun Tu, Shih-Chin Lien, Shyi-Yuan Wu
  • Patent number: 9054524
    Abstract: A bi-directional electrostatic discharge (ESD) protection device may include a substrate, an N+ doped buried layer, an N-type well region and two P-type well regions. The N+ doped buried layer may be disposed proximate to the substrate. The N-type well region may encompass the two P-type well regions such that a portion of the N-type well region is interposed between the two P-type well regions. The P-type well regions may be disposed proximate to the N+ doped buried layer and comprise one or more N+ doped plates and one or more P+ doped plates.
    Type: Grant
    Filed: October 19, 2012
    Date of Patent: June 9, 2015
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Hsin-Liang Chen, Shuo-Lun Tu
  • Publication number: 20150097236
    Abstract: A lateral drain metal oxide semiconductor (LDMOS) device includes a well region having a second conductive type in a substrate, a body region having a first conductive type in the well region, a drift region having the second conductive type in the well region and spaced apart from the body region, a source region having the second conductive type in the body region, a drain region having the second conductive type in the drift region, a gate structure on the well region between the source region and the drain region, a shallow trench isolation (STI) structure in the drift region between the drain region and the source region, and a buried layer having the first conductive type in the well region under the drift region, a center of the buried layer being aligned with a center of the STI structure.
    Type: Application
    Filed: October 3, 2013
    Publication date: April 9, 2015
    Applicant: Macronix International Co., Ltd.
    Inventors: Jiun-Yan Tsai, Shuo-Lun Tu, Shih-Chin Lien, Shyi-Yuan Wu
  • Patent number: 8963253
    Abstract: A bi-directional electrostatic discharge (ESD) protection device may include a substrate, an N+ doped buried layer, an N-type well region and two P-type well regions. The N+ doped buried layer may be disposed proximate to the substrate. The N-type well region may encompass the two P-type well regions such that a portion of the N-type well region is interposed between the two P-type well regions. The P-type well regions may be disposed proximate to the N+ doped buried layer and comprise one or more N+ doped plates, one or more P+ doped plates, one or more field oxide (FOX) portions, and one or more field plates. A multi-emitter structure is also provided.
    Type: Grant
    Filed: October 23, 2012
    Date of Patent: February 24, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Hsin-Liang Chen, Shuo-Lun Tu
  • Publication number: 20150044808
    Abstract: A method of fabricating an integrated semiconductor device, comprising: providing a substrate having a first region and a second region; and forming a semiconductor unit on the first region and forming a micro electro mechanical system (MEMS) unit on the second region in one process.
    Type: Application
    Filed: September 25, 2014
    Publication date: February 12, 2015
    Inventors: Hsueh-I Huang, Ming-Tung Lee, Shuo-Lun Tu
  • Patent number: 8897470
    Abstract: A method of fabricating an integrated semiconductor device, comprising: providing a substrate having a first region and a second region; and forming a semiconductor unit on the first region and forming a micro electro mechanical system (MEMS) unit on the second region in one process.
    Type: Grant
    Filed: July 31, 2009
    Date of Patent: November 25, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Hsueh-I Huang, Ming-Tung Lee, Shuo-Lun Tu
  • Patent number: 8790984
    Abstract: An NPN bipolar junction transistor is disclosed that exhibits a collector-to-emitter breakdown voltage greater than 10 volts and a beta greater than 300. The large value of beta is obtained by fabricating the transistor with an extra N-type layer that reduces recombination of electrons and holes.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: July 29, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Cheng-Chi Lin, Shuo-Lun Tu, Shih-Chin Lien
  • Publication number: 20140197467
    Abstract: A JFET structure includes a first JFET having a first terminal and a second JFET neighboring with the first JFET. Both JFETs commonly share the first terminal and the first terminal is between the gate of each JFET. The JFET also provides at least one tuning knob to adjust the pinch-off voltage and a tuning knob to adjust the breakdown voltage of the JFET structure. Moreover, the JFET has a buried layer as another tuning knob to adjust the pinch-off voltage of the JFET structure.
    Type: Application
    Filed: January 14, 2013
    Publication date: July 17, 2014
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: WEI-HSUN HSU, SHUO-LUN TU, SHIH-CHIN LIEN, SHYI-YUAN WU
  • Publication number: 20140111890
    Abstract: A bi-directional electrostatic discharge (ESD) protection device may include a substrate, an N+ doped buried layer, an N-type well region and two P-type well regions. The N+ doped buried layer may be disposed proximate to the substrate. The N-type well region may encompass the two P-type well regions such that a portion of the N-type well region is interposed between the two P-type well regions. The P-type well regions may be disposed proximate to the N+ doped buried layer and comprise one or more N+ doped plates and one or more P+ doped plates.
    Type: Application
    Filed: October 19, 2012
    Publication date: April 24, 2014
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Hsin-Liang Chen, Shuo-Lun Tu
  • Publication number: 20140111892
    Abstract: A bi-directional electrostatic discharge (ESD) protection device may include a substrate, an N+ doped buried layer, an N-type well region and two P-type well regions. The N+ doped buried layer may be disposed proximate to the substrate. The N-type well region may encompass the two P-type well regions such that a portion of the N-type well region is interposed between the two P-type well regions. The P-type well regions may be disposed proximate to the N+ doped buried layer and comprise one or more N+ doped plates, one or more P+ doped plates, one or more field oxide (FOX) portions, and one or more field plates. A multi-emitter structure is also provided.
    Type: Application
    Filed: October 23, 2012
    Publication date: April 24, 2014
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Hsin-Liang Chen, Shuo-Lun Tu
  • Patent number: 8664690
    Abstract: A bi-directional triode thyristor (TRIAC) device for high voltage electrostatic discharge (ESD) protection may include a substrate, an N+ doped buried layer, an N-type well region and two P-type well regions. The N+ doped buried layer may be disposed proximate to the substrate. The N-type well region may encompass the two P-type well regions such that a portion of the N-type well region is interposed between the two P-type well regions. The P-type well regions may be disposed proximate to the N+ doped buried layer and comprise one or more N+ doped plates and one or more P+ doped plates. The portion of the N-type well region that is interposed between the two P-type well regions may comprise one or more P-type portions, such as a P+ doped plate or a P-type implant.
    Type: Grant
    Filed: November 15, 2012
    Date of Patent: March 4, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Hsin-Liang Chen, Shuo-Lun Tu, Wing-Chor Chan, Shyi-Yuan Wu
  • Patent number: 8581339
    Abstract: A bipolar junction transistor and a manufacturing method for the same are provided. The bipolar junction transistor includes a well region, an emitter electrode, a base electrode, a collector electrode, and a conductive layer. The emitter electrode, the base electrode and the collector electrode are separated from each other by the well region. The conductive layer is on the well region between the base electrode and the collector electrode.
    Type: Grant
    Filed: August 8, 2011
    Date of Patent: November 12, 2013
    Assignee: Macronix International Co., Ltd.
    Inventors: Chin-Wei Chang, Ching-Lin Chan, Chin-Shien Lu, Ming-Tung Lee, Shuo-Lun Tu
  • Publication number: 20130285136
    Abstract: An apparatus of and method for making enhanced Schottky diodes having p-body regions operable to pinch a current flow path in a high-voltage n-well region and field plate structures operable to distribute an electric potential of the Schottky diode allow for a device with enhanced breakdown voltage properties. N-well regions implanted into the substrate over a p-type epitaxial layer may act as an anode of the Schottky diode and n-type well regions implanted in the high-voltage n-well regions may act as cathodes of the Schottky diode. The Schottky diode may also be used as a low-side mosfet structure device.
    Type: Application
    Filed: April 25, 2012
    Publication date: October 31, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chin-Hsien LU, Shuo-Lun TU, Chin-Wei CHANG, Ching-Lin CHAN, Ming-Tung LEE
  • Patent number: 8421124
    Abstract: An NPN bipolar junction transistor is disclosed that exhibits a collector-to-emitter breakdown voltage greater than 10 volts and a beta greater than 300. The large value of beta is obtained by fabricating the transistor with an extra N-type layer that reduces recombination of electrons and holes.
    Type: Grant
    Filed: March 15, 2010
    Date of Patent: April 16, 2013
    Assignee: Macronix International Co., Ltd.
    Inventors: Cheng-Chi Lin, Shuo-Lun Tu, Shih-Chin Lien
  • Publication number: 20130037914
    Abstract: A bipolar junction transistor and a manufacturing method for the same are provided. The bipolar junction transistor includes a well region, an emitter electrode, a base electrode, a collector electrode, and a conductive layer. The emitter electrode, the base electrode and the collector electrode are separated from each other by the well region. The conductive layer is on the well region between the base electrode and the collector electrode.
    Type: Application
    Filed: August 8, 2011
    Publication date: February 14, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chin-Wei Chang, Ching-Lin Chan, Chin-Shien Lu, Ming-Tung Lee, Shuo-Lun Tu