Patents by Inventor Shuo Na
Shuo Na has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11328834Abstract: A method of fabricating a transparent conductor is provided. The method includes forming a nanowire dispersion layer on a substrate, forming a nanowire network layer on the substrate by drying the nanowire dispersion layer, and forming a matrix material layer on the nanowire network layer.Type: GrantFiled: January 21, 2020Date of Patent: May 10, 2022Assignee: Cambrios Film Solutions CorporationInventors: Jonathan S. Alden, Haixia Dai, Michael R. Knapp, Shuo Na, Hash Pakbaz, Florian Pschenitzka, Xina Quan, Michael A. Spaid, Adrian Winoto, Jeffrey Wolk
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Publication number: 20210028321Abstract: A transparent conductor including a conductive layer coated on a substrate is described. More specifically, the conductive layer comprises a network of nanowires that may be embedded in a matrix. The conductive layer is optically clear, patternable and is suitable as a transparent electrode in visual display devices such as touch screens, liquid crystal displays, plasma display panels and the like.Type: ApplicationFiled: August 17, 2020Publication date: January 28, 2021Inventors: Pierre-Marc Allemand, Haixia Dai, Shuo Na, Hash Pakbaz, Florian Pschenitzka, Xina Quan, Jelena Sepa, Michael A. Spaid
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Patent number: 10749048Abstract: A transparent conductor including a conductive layer coated on a substrate is described. More specifically, the conductive layer comprises a network of nanowires that may be embedded in a matrix. The conductive layer is optically clear, patternable and is suitable as a transparent electrode in visual display devices such as touch screens, liquid crystal displays, plasma display panels and the like.Type: GrantFiled: May 19, 2014Date of Patent: August 18, 2020Assignee: Cambrios Film Solutions CorporationInventors: Pierre-Marc Allemand, Haixia Dai, Shuo Na, Hash Pakbaz, Florian Pschenitzka, Xina Quan, Jelena Sepa, Michael A. Spaid
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Publication number: 20200161017Abstract: A transparent conductor including a conductive layer coated on a substrate is described. More specifically, the conductive layer comprises a network of nanowires which may be embedded in a matrix. The conductive layer is optically transparent and flexible. It can be coated or laminated onto a variety of substrates, including flexible and rigid substrates.Type: ApplicationFiled: January 21, 2020Publication date: May 21, 2020Inventors: Jonathan S. Alden, Haixia Dai, Michael R. Knapp, Shuo Na, Hash Pakbaz, Florian Pschenitzka, Xina Quan, Michael A. Spaid, Adrian Winoto, Jeffrey Wolk
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Patent number: 10580549Abstract: A method of fabricating a transparent conductor includes the following steps. The first step is drawing a substrate from a first reel to a second reel along a travelling path, and along the travelling path. Next step is forming a metal nanowire dispersion layer on the substrate and then drying the metal nanowire dispersion layer to form a metal nanowire network layer. Next step is forming a matrix layer on the metal nanowire network layer so as to form a conductive layer of the metal nanowire network layer embedded in the matrix layer.Type: GrantFiled: January 15, 2018Date of Patent: March 3, 2020Assignee: Cambrios Film Solutions CorporationInventors: Jonathan S. Alden, Haixia Dai, Michael R. Knapp, Shuo Na, Hash Pakbaz, Florian Pschenitzka, Xina Quan, Michael A. Spaid, Adrian Winoto, Jeffrey Wolk
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Patent number: 10309013Abstract: Systems and methods are provided for determining a clean endpoint time for a current run of a chamber. The clean endpoint time for the current run may be determined by determining that a chamber parameter, such as a chamber pressure, has stabilized. Historical clean endpoint time data is updated by adding the clean endpoint time for the current run of the chamber. A recommended clean endpoint time is then determined for the chamber based on the updated historical clean endpoint time data.Type: GrantFiled: March 13, 2014Date of Patent: June 4, 2019Assignee: APPLIED MATERIALS, INC.Inventors: Ilias Iliopoulos, Shuo Na, Jose Albor
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Publication number: 20180218802Abstract: A transparent conductor including a conductive layer coated on a substrate is described. More specifically, the conductive layer comprises a network of nanowires which may be embedded in a matrix. The conductive layer is optically transparent and flexible. It can be coated or laminated onto a variety of substrates, including flexible and rigid substrates.Type: ApplicationFiled: January 15, 2018Publication date: August 2, 2018Inventors: Jonathan S. Alden, Haixia Dai, Michael R. Knapp, Shuo Na, Hash Pakbaz, Florian Pschenitzka, Xina Quan, Michael A. Spaid, Adrian Winoto, Jeffrey Wolk
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Patent number: 10002748Abstract: The present invention generally relates to a method for detecting the breakage of one or more grounding straps without stopping processing or opening the processing chamber for inspection. In one embodiment, a method for detecting grounding strap breakage in a processing chamber includes monitoring real-time RF related data from plasma generated in the processing chamber. The method also includes comparing the real-time RF related data with a pre-determined threshold RF related data. The method includes generating an alert if the real-time RF related data meets or exceeds the pre-determined threshold RF related data. In one embodiment, the RF related data includes RF frequency, direct current voltage, voltage peak-to-peak, and/or RF reflected power.Type: GrantFiled: January 30, 2015Date of Patent: June 19, 2018Assignee: Applied Materials, Inc.Inventors: Ilias Iliopoulos, Shuo Na, Kelby Yancy, Chunsheng Chen
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Patent number: 9899123Abstract: A method for forming a transparent conductor including a conductive layer coated on a substrate is described. The method comprises depositing a plurality of metal nanowires on a surface of a substrate, the metal nanowires being dispersed in a liquid; and forming a metal nanowire network layer on the substrate by allowing the liquid to dry.Type: GrantFiled: April 4, 2008Date of Patent: February 20, 2018Inventors: Jonathan S. Alden, Haixia Dai, Michael R. Knapp, Shuo Na, Hash Pakbaz, Florian Pschenitzka, Xina Quan, Michael A. Spaid, Adrian Winoto, Jeffrey Wolk
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Patent number: 9704762Abstract: Methods and apparatus for determining substrate integrity and alignment are described. Devices as described herein can include a transfer chamber, one or more process chambers, a loadlock chamber a first optical device, a second optical device and a radiation source positioned outside and above an opening for the loadlock chamber. Methods as described herein can include delivering a substrate to an opening in a process chamber, activating the optical device and the radiation source and capturing a plurality of images, extracting a substrate edge pattern from the plurality of images, comparing the substrate edge pattern to an expected edge pattern to determine a level of edge variance and adjusting or stopping a process if the level of edge variance is outside of an edge variation range.Type: GrantFiled: January 30, 2015Date of Patent: July 11, 2017Assignee: APPLIED MATERIALS, INC.Inventors: Ilias Iliopoulos, Shuo Na, Kelby Yancy, Chunsheng Chen
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Patent number: 9653269Abstract: A method and apparatus for detecting substrate arcing and breakage within a processing chamber is provided. A controller monitors chamber data, e.g., parameters such as RF signals, voltages, and other electrical parameters, during operation of the processing chamber, and analyzes the chamber data for abnormal spikes and trends. Using such data mining and analysis, the controller can detect broken substrates without relying on glass presence sensors on robots, but rather based on the chamber data.Type: GrantFiled: August 13, 2014Date of Patent: May 16, 2017Assignee: APPLIED MATERIALS, INC.Inventors: Shuo Na, Kelby Yancy, Chunsheng Chen, Ilias Iliopoulos
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Publication number: 20150221484Abstract: The present invention generally relates to a method for detecting the breakage of one or more grounding straps without stopping processing or opening the processing chamber for inspection. In one embodiment, a method for detecting grounding strap breakage in a processing chamber includes monitoring real-time RF related data from plasma generated in the processing chamber. The method also includes comparing the real-time RF related data with a pre-determined threshold RF related data. The method includes generating an alert if the real-time RF related data meets or exceeds the pre-determined threshold RF related data. In one embodiment, the RF related data includes RF frequency, direct current voltage, voltage peak-to-peak, and/or RF reflected power.Type: ApplicationFiled: January 30, 2015Publication date: August 6, 2015Inventors: Ilias ILIOPOULOS, Shuo NA, Kelby YANCY, Chunsheng CHEN
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Publication number: 20150221563Abstract: Methods and apparatus for determining substrate integrity and alignment are described. Devices as described herein can include a transfer chamber, one or more process chambers, a loadlock chamber a first optical device, a second optical device and a radiation source positioned outside and above an opening for the loadlock chamber. Methods as described herein can include delivering a substrate to an opening in a process chamber, activating the optical device and the radiation source and capturing a plurality of images, extracting a substrate edge pattern from the plurality of images, comparing the substrate edge pattern to an expected edge pattern to determine a level of edge variance and adjusting or stopping a process if the level of edge variance is outside of an edge variation range.Type: ApplicationFiled: January 30, 2015Publication date: August 6, 2015Inventors: Ilias ILIOPOULOS, Shuo NA, Kelby YANCY, Chunsheng CHEN
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Publication number: 20150219565Abstract: A method and apparatus for measuring the thickness of a deposited layer are disclosed herein. Devices as described herein can include a transfer chamber, one or more processing chambers each having an entrance, a loadlock chamber comprising a loadlock entrance and a loadlock exit; and an optical monitoring system comprising a plurality of optical devices positioned proximate to at least one of the entrances. Methods as described herein can include delivering a substrate with at least one deposited layer through an opening in a chamber, activating an optical monitoring system at the opening of the chamber such that the optical monitoring system performs a plurality of optical measurements of the deposited layers, delivering the optical measurements to a signal processing system and correlating the optical measurements to one or more film attributes.Type: ApplicationFiled: January 30, 2015Publication date: August 6, 2015Inventors: Ilias ILIOPOULOS, Shuo NA, Kelby YANCY, Chunsheng CHEN
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Publication number: 20150147830Abstract: A method comprising processing a substrate exposed to a plasma in a processing chamber, obtaining a metric indicative of a parameter of the plasma during the processing of the substrate, and determining a defect in the substrate by comparing the metric to a predefined criteria.Type: ApplicationFiled: November 26, 2013Publication date: May 28, 2015Inventors: Ilias ILIOPOULOS, Shuo NA, Kelby YANCY
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Publication number: 20150048862Abstract: A method and apparatus for detecting substrate arcing and breakage within a processing chamber is provided. A controller monitors chamber data, e.g., parameters such as RF signals, voltages, and other electrical parameters, during operation of the processing chamber, and analyzes the chamber data for abnormal spikes and trends. Using such data mining and analysis, the controller can detect broken substrates without relying on glass presence sensors on robots, but rather based on the chamber data.Type: ApplicationFiled: August 13, 2014Publication date: February 19, 2015Inventors: Shuo NA, Kelby YANCY, Chunsheng CHEN, Ilias ILIOPOULOS
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Publication number: 20140338735Abstract: A transparent conductor including a conductive layer coated on a substrate is described. More specifically, the conductive layer comprises a network of nanowires that may be embedded in a matrix. The conductive layer is optically clear, patternable and is suitable as a transparent electrode in visual display devices such as touch screens, liquid crystal displays, plasma display panels and the like.Type: ApplicationFiled: May 19, 2014Publication date: November 20, 2014Applicant: Cambrios Technologies CorporationInventors: Pierre-Marc Allemand, Haixia Dai, Shuo Na, Hash Pakbaz, Florian Pschenitzka, Xina Quan, Jelena Sepa, Michael A. Spaid
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Patent number: 8865027Abstract: A transparent conductor including a conductive layer coated on a substrate is described. More specifically, the conductive layer comprises a network of nanowires which may be embedded in a matrix. The conductive layer is optically transparent and flexible. It can be coated or laminated onto a variety of substrates, including flexible and rigid substrates.Type: GrantFiled: April 4, 2008Date of Patent: October 21, 2014Assignee: Cambrios Technologies CorporationInventors: Jonathan S. Alden, Haixia Dai, Michael R. Knapp, Shuo Na, Hash Pakbaz, Florian Pschenitzka, Xina Quan, Michael A. Spaid, Adrian Winoto, Jeffrey Wolk
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Publication number: 20140279750Abstract: Systems and methods are provided for determining a clean endpoint time for a current run of a chamber. The clean endpoint time for the current run may be determined by determining that a chamber parameter, such as a chamber pressure, has stabilized. Historical clean endpoint time data is updated by adding the clean endpoint time for the current run of the chamber. A recommended clean endpoint time is then determined for the chamber based on the updated historical clean endpoint time data.Type: ApplicationFiled: March 13, 2014Publication date: September 18, 2014Applicant: APPLIED MATERIALS, INC.Inventors: Ilias Iliopoulos, Shuo Na, Jose Albor
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Patent number: 8760606Abstract: A transparent conductor including a conductive layer coated on a substrate is described. More specifically, the conductive layer comprises a network of nanowires that may be embedded in a matrix. The conductive layer is optically clear, patternable and is suitable as a transparent electrode in visual display devices such as touch screens, liquid crystal displays, plasma display panels and the like.Type: GrantFiled: October 15, 2010Date of Patent: June 24, 2014Assignee: Cambrios Technologies CorporationInventors: Pierre-Marc Allemand, Haixia Dai, Shuo Na, Hash Pakbaz, Florian Pschenitzka, Xina Quan, Jelena Sepa, Michael A. Spaid