Abstract: A miniature combined multi-axis force sensor structure includes a sensor body, a first shell and a second shell, two horizontal main beams and two vertical main beams are arranged on the periphery of an inner round platform in a cross shape, tail ends of the horizontal main beams and the vertical main beams are each connected to a vertical floating beam, and the horizontal floating beams consist of two thin-walled cambered beams; two ends of the horizontal floating beam are each connected to an outer round platform by means of an annular platform; the sensor body is arranged between the first shell and the second shell; strain gauges are stuck on the horizontal main beams and the vertical main beams to form two Wheatstone bridges; and when force/torque acts on the cross beam, the sensor deforms, and the resistance value of strain gauge at corresponding position changes.

Abstract: A miniature combined multi-axis force sensor structure includes a sensor body, a first shell and a second shell, two horizontal main beams and two vertical main beams are arranged on the periphery of an inner round platform in a cross shape, tail ends of the horizontal main beams and the vertical main beams are each connected to a vertical floating beam, and the horizontal floating beams consist of two thin-walled cambered beams; two ends of the horizontal floating beam are each connected to an outer round platform by means of an annular platform; the sensor body is arranged between the first shell and the second shell; strain gauges are stuck on the horizontal main beams and the vertical main beams to form two Wheatstone bridges; and when force/torque acts on the cross beam, the sensor deforms, and the resistance value of strain gauge at corresponding position changes.

Abstract: The present invention discloses a high-precision and miniaturized on-orbit calibration device for a six-dimensional force sensor of a space station manipulator and a calibration method thereof, which include an inverted ? shape fixing bracket, three force applying devices, and a cubic stress block. Each force applying device includes a force applying head, a single axis force sensor, a force source part and a fastening part. The force source part includes an upper support plate, a second electrode plate, piezoelectric ceramic plates, a first electrode plate and a lower support plate, which are coaxially arranged sequentially from top to bottom. The single axis force sensor is mounted on the top of the upper support plate, and the hemispherical force applying head is mounted on the top of the single axis force sensor. The cubic stress block is mounted on the top of the six-dimensional force sensor.

Abstract: A method for reducing hysteresis error and high frequency noise error of capacitive tactile sensors includes the following steps: step 1: calibration, specifically including positive stroke calibration to form n positive stroke curves and negative stroke calibration to form n negative stroke curves; step 2: averaging, specifically including positive stroke averaging to form an average positive stroke curve, negative stroke averaging to form an average negative stroke curve, and comprehensive averaging to form a comprehensive stroke curve; step 3: fitting modeling, to obtain a positive stroke fitting function, a negative stroke fitting function, and a comprehensive fitting function; step 4: measurement; step 5: noise filtering; step 6: stroke direction discrimination; and step 7: resolving, to obtain the force at the current time by using a corresponding fitting function based on the stroke direction discrimination result.

Abstract: The present invention discloses a six-dimensional force sensor with high sensitivity and low inter-dimensional coupling, including a clockwise or counterclockwise swastika-shaped beam, vertical beams, a rectangular outer frame, and strain gauges; the clockwise or counterclockwise swastika-shaped beam includes a cross-shaped transverse beam and four rectangular transverse beams; a center of the cross-shaped transverse beam is provided with several force application holes used for applying forces and moments; four tail ends of the cross-shaped transverse beam are each connected to one of the rectangular transverse beams to form a clockwise or counterclockwise swastika-shaped structure; a top end of a vertical beam is connected to a tail end of a corresponding rectangular transverse beam, and bottom ends of the vertical beams are connected to the rectangular outer frame; and there are a plurality of strain gauges to form six groups of Wheatstone bridges that are respectively used for measuring an X-direction for

Abstract: The present invention discloses a high-precision and miniaturized on-orbit calibration device for a six-dimensional force sensor of a space station manipulator and a calibration method thereof, which include an inverted ? shape fixing bracket, three force applying devices, and a cubic stress block. Each force applying device includes a force applying head, a single axis force sensor, a force source part and a fastening part. The force source part includes an upper support plate, a second electrode plate, piezoelectric ceramic plates, a first electrode plate and a lower support plate, which are coaxially arranged sequentially from top to bottom. The single axis force sensor is mounted on the top of the upper support plate, and the hemispherical force applying head is mounted on the top of the single axis force sensor. The cubic stress block is mounted on the top of the six-dimensional force sensor.

Abstract: A method for reducing hysteresis error and high frequency noise error of capacitive tactile sensors includes the following steps: step 1: calibration, specifically including positive stroke calibration to form n positive stroke curves and negative stroke calibration to form n negative stroke curves; step 2: averaging, specifically including positive stroke averaging to form an average positive stroke curve, negative stroke averaging to form an average negative stroke curve, and comprehensive averaging to form a comprehensive stroke curve; step 3: fitting modeling, to obtain a positive stroke fitting function, a negative stroke fitting function, and a comprehensive fitting function; step 4: measurement; step 5: noise filtering; step 6: stroke direction discrimination; and step 7: resolving, to obtain the force at the current time by using a corresponding fitting function based on the stroke direction discrimination result.

Abstract: The present invention discloses a six-dimensional force sensor with high sensitivity and low inter-dimensional coupling, including a clockwise or counterclockwise swastika-shaped beam, vertical beams, a rectangular outer frame, and strain gauges; the clockwise or counterclockwise swastika-shaped beam includes a cross-shaped transverse beam and four rectangular transverse beams; a center of the cross-shaped transverse beam is provided with several force application holes used for applying forces and moments; four tail ends of the cross-shaped transverse beam are each connected to one of the rectangular transverse beams to form a clockwise or counterclockwise swastika-shaped structure; a top end of a vertical beam is connected to a tail end of a corresponding rectangular transverse beam, and bottom ends of the vertical beams are connected to the rectangular outer frame; and there are a plurality of strain gauges to form six groups of Wheatstone bridges that are respectively used for measuring an X-direction for

Abstract: Provided is an aluminum precursor for thin-film deposition having a structure of formula (I) or (II), wherein R1, R2, R3, R4, R5, R6, and R7 each independently represent a hydrogen atom, C1˜C6 alkyl, halo-C1˜C6 alkyl, C2˜C5 alkenyl, halo-C2˜C5 alkenyl, C3˜C10 cycloalkyl, halo-C3˜C10 cycloalkyl, C6˜C10 aryl, halo-C6˜C10 aryl or —Si(R0)3, and wherein R0 is C1˜C6 alkyl or halo-C1˜C6 alkyl. According to the present invention, based on the interaction principle between molecules, aluminum precursors for thin-film deposition are provided, which have a good thermal stability, are not susceptible to decomposition and convenient for storage and transportation, have good volatility at a high temperature, and are excellent in film formation.