Patents by Inventor Shyam Prasad Teegapuram

Shyam Prasad Teegapuram has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor structure, in particular phase change memory device having a uniform height heater
    Patent number: 8026173
    Abstract: A phase change memory formed by a plurality of phase change memory devices having a chalcogenide memory region extending over an own heater. The heaters have all a relatively uniform height. The height uniformity is achieved by forming the heaters within pores in an insulator that includes an etch stop layer and a sacrificial layer. The sacrificial layer is removed through an etching process such as chemical mechanical planarization. Since the etch stop layer may be formed in a repeatable way and is common across all the devices on a wafer, considerable uniformity is achieved in heater height. Heater height uniformity results in more uniformity in programmed memory characteristics.
    Type: Grant
    Filed: March 13, 2008
    Date of Patent: September 27, 2011
    Assignee: STMicroelectronics S.r.l.
    Inventors: Ilya Karpov, Yudong Kim, Ming Jin, Shyam Prasad Teegapuram, Jinwook Lee
  • SEMICONDUCTOR STRUCTURE, IN PARTICULAR PHASE CHANGE MEMORY DEVICE HAVING A UNIFORM HEIGHT HEATER
    Publication number: 20090020743
    Abstract: A phase change memory formed by a plurality of phase change memory devices having a chalcogenide memory region extending over an own heater. The heaters have all a relatively uniform height. The height uniformity is achieved by forming the heaters within pores in an insulator that includes an etch stop layer and a sacrificial layer. The sacrificial layer is removed through an etching process such as chemical mechanical planarization. Since the etch stop layer may be formed in a repeatable way and is common across all the devices on a wafer, considerable uniformity is achieved in heater height. Heater height uniformity results in more uniformity in programmed memory characteristics.
    Type: Application
    Filed: March 13, 2008
    Publication date: January 22, 2009
    Applicant: STMICROELECTRONICS S.R.L.
    Inventors: Ilya Karpov, Yudong Kim, Ming Jin, Shyam Prasad Teegapuram, Jinwook Lee