Patents by Inventor Shyh-Kuen Lai

Shyh-Kuen Lai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dry etching apparatus capable of monitoring motion of WAP ring thereof
    Patent number: 7632377
    Abstract: An optical monitoring system includes a ring-shaped object suspended by and engaged with a plurality of vertical plunger shafts. Normally, the vertical plunger shafts move upward and downward reciprocally and coherently, but independently, such that the ring-shaped object ascends or descends horizontally. A light transceiver device is affixed to one vertical plunger shaft. A plurality optical reflector elements are affixed to respective other plunger shafts. A light beam emanated from said light transceiver is reflected by the optical reflector elements and is eventually re-directed back to the light transceiver device.
    Type: Grant
    Filed: January 24, 2006
    Date of Patent: December 15, 2009
    Assignee: United Microelectronics Corp.
    Inventor: Shyh-Kuen Lai
  • DRY ETCHING APPARATUS CAPABLE OF MONITORING MOTION OF WAP RING THEREOF
    Publication number: 20070169888
    Abstract: An optical monitoring system includes a ring-shaped object suspended by and engaged with a plurality of vertical plunger shafts. Normally, the vertical plunger shafts move upward and downward reciprocally and coherently, but independently, such that the ring-shaped object ascends or descends horizontally. A light transceiver device is affixed to one vertical plunger shaft. A plurality optical reflector elements are affixed to respective other plunger shafts. A light beam emanated from said light transceiver is reflected by the optical reflector elements and is eventually re-directed back to the light transceiver device.
    Type: Application
    Filed: January 24, 2006
    Publication date: July 26, 2007
    Inventor: Shyh-Kuen Lai