Patents by Inventor Si-Ming Fang

Si-Ming Fang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor wafer transfer apparatus with back-to-back positioning and separation
    Patent number: 4856957
    Abstract: An apparatus is disclosed for the bulk transfer of semiconductor wafers from container to container for processing in the back-to-back configuration. The apparatus includes a stage (12) for selectively raising the wafers from a boat (14) upward into a retaining mechanism (18). The wafers are confined in a back-to-back configuration through a slot (64) in the end of a back-to-back retainer (34). The back-to-back configured wafers are then removed, processed and then disposed back in the retaining mechanism (18). The back-to-back wafers are aligned with an alignment slot (76) in a preseparation retainer (36). The preseparation retainer (36) provides both alignment and a slight preseparation with respect to a separation retainer (38). The separation retainer (38) has a separation edge (118) which separates the back-to-back configured wafers into slots (104) and (108). The wafers are then removed after separation thereof.
    Type: Grant
    Filed: January 11, 1988
    Date of Patent: August 15, 1989
    Assignee: Mactronix, Inc.
    Inventors: John J. Lau, Si-Ming Fang