Patents by Inventor Sian-Jhu Tsai

Sian-Jhu Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of virtual metrology using combined models
    Publication number: 20160274570
    Abstract: A method of virtual metrology is disclosed. Process data and measurement values corresponding to a workpiece are collected. The process data and the measurement values are used to establish a conjecture model. A theoretical model corresponding to the workpiece and the conjecture model is used to establish another conjecture model. The another conjecture model is used to establish a virtual metrology value. The virtual metrology value is used to predict properties of a subsequently manufactured workpiece.
    Type: Application
    Filed: March 18, 2015
    Publication date: September 22, 2016
    Inventors: Lian-Hua Shih, Ching-Hsing Hsieh, Feng-Chi Chung, Chia-Chi Chang, Yu-Cheng Lin, Sian-Jhu Tsai, Meng-Chih Chang, Yi-Hui Tseng