Patents by Inventor Siavash P. Anaraki

Siavash P. Anaraki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of forming oxide masks with submicron openings and microstructures formed thereby
    Patent number: 7056757
    Abstract: Processing techniques are disclosed for batch fabrication of microstructures comprising an oxide mask on a substrate with submicron openings formed therein, and microstructures having deep-submicron, high aspect-ratio etched trenches, using conventional optical photolithography. Exemplary high aspect-ratio etched-trench microstructures that may be produced include single crystal resonators and sensors.
    Type: Grant
    Filed: November 22, 2004
    Date of Patent: June 6, 2006
    Assignee: Georgia Tech Research Corporation
    Inventors: Farrokh Ayazi, Reza Abdolvand, Siavash P. Anaraki