Abstract: Described are filter membranes, related systems, and related method useful for producing purified (e.g., ultrapure) water, including membranes, systems, and methods of preparing purified water that will be useable in processes of manufacturing electronic and semiconductor devices.

Abstract: Described are coated porous polymeric filter membranes that include a filter membrane substrate and an ionic polymer coating applied to the surface of the substrate; methods of making the coated porous polymeric filter membranes and filters that include such a coated membrane; and method of using the coated membranes to remove metal ions from purified water.

Abstract: The disclosure is directed to removal of metal contaminants from fluids, as well as ligand-modified filter materials useful for carrying out such methods. The filters and methods of this disclosure are particularly effective for removal of metals from liquid compositions comprising amines. Such liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist or liquids used in etching. The ligand-modified filters, such as ligand-modified porous membranes, can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system.

Abstract: The disclosure is directed to removal of metal contaminants from fluids, as well as ligand-modified filter materials useful for carrying out such methods. The filters and methods of this disclosure are particularly effective for removal of metals from liquid compositions comprising amines. Such liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist or liquids used in etching. The ligand-modified filters, such as ligand-modified porous membranes, can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system.

Abstract: A filter housing includes a sleeve, a first endcap coupled to a first open end of the sleeve, and a second endcap coupled to the second open end of the sleeve. The sleeve includes an interior volume with an outer radial portion and an inner radial portion. The first endcap includes first plurality of ports that connect to the outer radial portion and the inner radial portion of the interior volume of the sleeve. The second endcap includes a second plurality of ports that connect to the outer radial portion and the inner radial portion of the interior volume of the sleeve. The filter housing is configured to enclose a filter member in the sleeve between the first endcap and the second endcap. A method is for filtering liquid with a filter that includes a filter member and a filter housing.

Abstract: A filter housing includes a sleeve, a first endcap coupled to a first open end of the sleeve, and a second endcap coupled to the second open end of the sleeve. The sleeve includes an interior volume with an outer radial portion and an inner radial portion. The first endcap includes first plurality of ports that connect to the outer radial portion and the inner radial portion of the interior volume of the sleeve. The second endcap includes a second plurality of ports that connect to the outer radial portion and the inner radial portion of the interior volume of the sleeve. The filter housing is configured to enclose a filter member in the sleeve between the first endcap and the second endcap. A method is for filtering liquid with a filter that includes a filter member and a filter housing.

Abstract: A filter unit includes a housing, a first filter and a second filter disposed in the housing, and a liquid flow path that extends through the first and second filters in series. The first filter includes a first axial end affixed to the housing and a first filter media. The second filter includes a first axial end affixed to the housing at the outlet and a second filter media. The liquid directed radially outward through the first filter media and radially inward through the second filter media. A method of filtering a liquid within a filter unit includes passing the liquid radially outward through a first filter media of a first filter, directing the liquid from the first filter to a second filter, and passing the liquid radially inward through a second filter element of the second filter.

Abstract: A filter unit for filtering liquid includes a housing with an inlet and an outlet, a first filter and a second filter disposed in the housing, and a liquid flow path extending from the inlet to the outlet. The liquid flow path directs the liquid one of radially inward and radially outward through a first filter media of the first filter and the other one of radially and directs the liquid the other one of radially inward and radially outward through a second filter media of the second filter. A method of filtering a liquid within a filter unit includes passing the liquid one of radially inward and radially outward through a first filter media of a first filter and passing the liquid the other one of radially inward and radially outward through a second filter media of a second filter.

Abstract: The disclosure provides a porous polymeric membrane having ionizable nitrogen functional groups at least at its surface, wherein such groups are associated with a hydroxide anion. The membranes are useful in the purification of polar solvents such as water and alcohols and are capable of removing trace amounts of anionic contaminants such as halides, phosphates, nitrates, nitrites, sulfites, and sulfates.

Abstract: Described are filter membranes, related systems, and related method useful for producing purified (e.g., ultrapure) water, including membranes, systems, and methods of preparing purified water that will be useable in processes of manufacturing electronic and semiconductor devices.

Abstract: The disclosure is directed to removal of metal contaminants from fluids, as well as ligand-modified filter materials useful for carrying out such methods. The filters and methods of this disclosure are particularly effective for removal of metals from liquid compositions comprising amines. Such liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist or liquids used in etching. The ligand-modified filters, such as ligand-modified porous membranes, can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system.