Patents by Inventor Sidney Marshall

Sidney Marshall has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low temperature CMOS/SOS process using dry pressure oxidation
    Patent number: 4179792
    Abstract: An enhancement type, self-aligned silicon gate complementary metal oxide semiconductor (CMOS)/silicon on sapphire (SOS) structure is made by generating all gate oxides and oxide isolated regions with dry oxygen at pressures above 1 atmosphere and at temperatures of 800.degree. C. to 825.degree. C. using ion implantation for all doping operations and plasma definition of all masking dielectrics.
    Type: Grant
    Filed: April 10, 1978
    Date of Patent: December 25, 1979
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventors: Sidney Marshall, Robert J. Zeto