Abstract: The invention relates to a separating, deflecting and transporting of a disc like substrate (3) such as e.g. a solar wafer. The apparatus (1) for the separating, deflecting and transporting of disc shaped substrates (3) which are sequentially arranged standing one after another in feed direction in the form of a substrate stack (5) within a liquid, comprises a vertical belt conveyor (9) with at least two conveyor belts (11, 11?), whose conveying span (10) is arranged at one front side (12) of the stack (5) parallel to the front side (12), wherein the belt conveyor (9) has a vacuum device (16) by means of which the respective foremost substrate (3) of the stack (5) can be sucked against at least a first conveyor belt (11), and wherein the at least two conveyor belts (11, 11?) of the vertical belt conveyor (9) are arranged coplanar to each other in the adjoining region.