Abstract: An integrated circuit (IC) fabrication tool and associated method for facilitating inline contactless sheet resistance measurement. In one arrangement, the tool comprises at least one main chamber, one or more processing chambers detachably coupled to the main chamber, each of the one or more processing chambers configured for effectuating a respective processing operation on a semiconductor wafer, and at least one sensor chamber detachably coupled to the at least one main chamber, the at least one sensor chamber having a contactless sensor assembly for sensing sheet resistance of a process layer of the semiconductor wafer based on eddy currents generated in the process layer.

Abstract: Organo-aluminum-silicon reducing agents reaction product of a dialkyl aluminum hydride with a polysiloxane having a viscosity of from 5 to 100 cSt (25.degree. C) and siloxane units having the formula ##STR1## in a molar ratio of from 0.8 to 2 mols of said siloxane units per mol of said dialkyl aluminum hydride, at a temperature not in excess of 80.degree. C, as well as the process of producing reducing agent reaction products. These reducing agent reaction products are soluble in organic solvents and can be used in solution therein.

Abstract: A catalyst for the preparation of low-pressure polyethylene comprising the reaction product, at a temperature of from 0.degree. to 100.degree. C, of(A) a reaction product of a dialkyl aluminum hydride with a polysiloxane having a viscosity of from 5 to 100 cSt (25.degree. C) and siloxane units having the formula ##EQU1## in a molar ratio of from 0.8 to 2 mols of said siloxane units per mol of said dialkyl aluminum hydride, withB. a compound of the formulaeTiX.sub.4.sub.-n (OR").sub.n , VX.sub.4.sub.-n (OR").sub.n, and VOX.sub.3.sub.-n (OR").sub.nWhere X is halogen, R" is an aliphatic hydrocarbon, and n is an integer from 0 to 2; as well as a method of producing low-pressure polyethylene utilizing said catalyst.