Patents by Inventor Sieki Ogura

Sieki Ogura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of making a DRAM cell with trench capacitor
    Patent number: 5395786
    Abstract: A DRAM cell of the trench capacitor type is formed by a simplified process that reduces cost and increases process latitude by forming the trench collar in a single step of expanding a shallow trench horizontally and conformally coating the collar; etching the trench to its final depth and implanting the bottom heavily and doping the walls lightly; recessing the poly liner in a non-critical step that exposes a contact area between the top of the poly and the adjacent transistor electrode.
    Type: Grant
    Filed: June 30, 1994
    Date of Patent: March 7, 1995
    Assignee: International Business Machines Corporation
    Inventors: Louis L. Hsu, Sieki Ogura, Joseph F. Shepard