Abstract: A method of oxidation treatment of the inner surface of a ferritic stainless steel pipe comprising feeding an oxidizing gas into steel pipe from one end thereof while moving the steel pipe in a pipe-length direction, and heating the pipe in a heating furnace in a non-oxidizing atmosphere at a specific temperature of T° C. which falls within the range of 700-1100° C. The method is capable of efficiently forming Cr oxide film having a uniform Cr content and film thickness over the entire length of the inner surface of the steel pipe used as a piping member or piping for supplying a high-purity fluid, such as high-purity gas or water used in a semiconductor manufacturing process.

Abstract: Stainless steels for high-purity gases which are superior in non-dusting characteristics required at the time of welding, corrosion resistance and non-catalytic property and which can be widely utilized in the manufacturing process of semiconductors, liquid crystal displays or the like. The austenitic stainless steels of the present invention are characterized by having decreased Mn, Al, Si and O contents. The austenitic stainless steels meet the non-dusting characteristics which are required at the time of welding. In addition, corrosion resistance, abrasion resistance and machinability are improved. The ferritic and the duplex stainless steels of the present invention are characterized in that they can readily form thereon a Cr oxide layer when subjected to oxidation treatment. The ferritic and two-phase stainless steels are superior in corrosion resistance to corrosive gases, and contain non-catalytic property against chemically-unstable gases.

Abstract: Stainless steels for high-purity gases which are superior in non-dusting characteristics required at the time of welding, corrosion resistance and non-catalytic property and which can be widely utilized in the manufacturing process of semiconductors, liquid crystal displays or the like. The austenitic stainless steels of the present invention are characterized by having decreased Mn, Al, Si and O contents. The austenitic stainless steels meet the non-dusting characteristics which are required at the time of welding. In addition, corrosion resistance, abrasion resistance and machinability are improved. The ferritic and the duplex stainless steels of the present invention are characterized in that they can readily form thereon a Cr oxide layer when subjected to oxidation treatment. The ferritic and two-phase stainless steels are superior in corrosion resistance to corrosive gases, and contain non-catalytic property against chemically-unstable gases.