Abstract: Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radios of curvature when the probe tip shape is approximated by a circle.

Abstract: Provided is a lamella preparation apparatus including an EB column (1), an FIB column (2), a reflected electron detector (5) for detecting charged particles released from a lamella (21), an input unit (10) for setting a first measurement region (41) on an upper side and a second measurement region (42) on a lower side of the lamella (21), and a calculation unit (15) for calculating a slant angle of the lamella (21) from a detected amount of the charged particles generated from the first measurement region (41) and a detected amount of the charged particles generated from the second measurement region (42) by irradiation of the electron beam (8) and a distance between the first measurement region (41) and the second measurement region (42).