Patents by Inventor Sil-Gun Jeong

Sil-Gun Jeong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for marking an identification mark on a wafer
    Patent number: 6596965
    Abstract: A method and an apparatus for marking an identification mark on a wafer. After the wafer is aligned, a laser beam is radiated onto a predetermined portion on the wafer so that the identification mark is engraved on the wafer. While the laser beam is being radiated, a gas blows towards the predetermined portion on the wafer so as to remove the particles which are created on the surface on the wafer caused by the radiation of the laser beam. A collecting and exhausting section is provided to collect and exhaust the gas that is mixed with the particles.
    Type: Grant
    Filed: August 30, 2001
    Date of Patent: July 22, 2003
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sil-Gun Jeong, Kyoung-Shin Park, Hi-Youn Cho, Byeong-Cheol Park
  • Method and apparatus for marking an identification mark on a wafer
    Publication number: 20020092836
    Abstract: A method and an apparatus for marking an identification mark on a wafer. After the wafer is aligned, a laser beam is radiated onto a predetermined portion on the wafer so that the identification mark is engraved on the wafer. While the laser beam is being radiated, a gas blows towards the predetermined portion on the wafer so as to remove the particles which are created on the surface on the wafer caused by the radiation of the laser beam. A collecting and exhausting section is provided to collect and exhaust the gas that is mixed with the particles.
    Type: Application
    Filed: August 30, 2001
    Publication date: July 18, 2002
    Inventors: Sil-Gun Jeong, Kyoung-Shin Park, Hi-Youn Cho, Byeong-Cheol Park