Patents by Inventor Silver XI

Silver XI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for semiconductor selective etching and BSI image sensor
    Patent number: 9362332
    Abstract: A method of selectively etching a semiconductor device and manufacturing a BSI image sensor device includes etching a doped silicon substrate with an HNA solution for a predetermined time duration to obtain an etching solution having a concentration C1 of nitrite ions, etching the semiconductor device using the obtained etching solution. Etching the semiconductor device requires an initial concentration C0 of nitride ions that is lower than C1. The HNA solution comprises a hydrofluoric acid (HF), a nitric acid (HNO3), and a acetic acid (CH3COOH). The BSI image sensor device will have a uniform thickness when etched using the thus obtained etching solution.
    Type: Grant
    Filed: November 14, 2014
    Date of Patent: June 7, 2016
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Simon Wang, Phil Wu, Victor Luo, Silver Xi, Jason Chang, Kevin Shi
  • METHOD FOR SEMICONDUCTOR SELECTIVE ETCHING AND BSI IMAGE SENSOR
    Publication number: 20160141330
    Abstract: A method of selectively etching a semiconductor device and manufacturing a BSI image sensor device includes etching a doped silicon substrate with an HNA solution for a predetermined time duration to obtain an etching solution having a concentration C1 of nitrite ions, etching the semiconductor device using the obtained etching solution. Etching the semiconductor device requires an initial concentration C0 of nitride ions that is lower than C1. The HNA solution comprises a hydrofluoric acid (HF), a nitric acid (HNO3), and a acetic acid (CH3COOH). The BSI image sensor device will have a uniform thickness when etched using the thus obtained etching solution.
    Type: Application
    Filed: November 14, 2014
    Publication date: May 19, 2016
    Inventors: Simon WANG, Phil WU, Victor LUO, Silver XI, Jason CHANG, Kevin SHI