Patents by Inventor Silvia Adorno
Silvia Adorno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11872591Abstract: A micro-machined ultrasonic transducer is proposed. The micro-machined ultrasonic transducer includes a membrane element for transmitting/receiving ultrasonic waves, during the transmission/reception of ultrasonic waves the membrane element oscillating, about an equilibrium position, at a respective resonance frequency. The equilibrium position of the membrane element is variable according to a biasing electric signal applied to the membrane element. The micro-machined ultrasonic transducer further comprises a cap structure extending above the membrane element; the cap structure identifies, between it and the membrane element, a cavity whose volume is variable according to the equilibrium position of the membrane element. The cap structure comprises an opening for inputting/outputting the ultrasonic waves into/from the cavity. The cap structure and the membrane element act as tunable Helmholtz resonator, whereby the resonance frequency is variable according to the volume of the cavity.Type: GrantFiled: December 10, 2020Date of Patent: January 16, 2024Assignee: STMICROELECTRONICS S.r.l.Inventors: Silvia Adorno, Roberto Carminati
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Publication number: 20230328456Abstract: A microelectromechanical electroacoustic transducer includes a supporting frame of semiconductor material, a membrane of semiconductor material, connected to the supporting frame along a perimeter and having central symmetry, and a piezoelectric actuator on a peripheral portion of the membrane. The membrane has through slits of elongated shape arranged around a center of the membrane.Type: ApplicationFiled: April 4, 2023Publication date: October 12, 2023Applicant: STMICROELECTRONICS S.r.l.Inventors: Fabrizio CERINI, Silvia ADORNO, Marco SALINA
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Publication number: 20230314257Abstract: Method for determining a first and a second calibrated value of atmospheric pressure, performed by an electronic apparatus comprising a fixed device and a first and a second movable device comprising respectively a first and a second movable barometer.Type: ApplicationFiled: February 15, 2023Publication date: October 5, 2023Applicant: STMICROELECTRONICS S.r.l.Inventors: Enri DUQI, Patrick FEDELI, Nicolo' MANCA, Silvia ADORNO
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Patent number: 11418888Abstract: An actuation structure of a MEMS electroacoustic transducer is formed in a die of semiconductor material having a monolithic body with a front surface and a rear surface extending in a horizontal plane x-y plane and defined in which are: a frame; an actuator element arranged in a central opening defined by the frame; cantilever elements, coupled at the front surface between the actuator element and the frame; and piezoelectric regions arranged on the cantilever elements and configured to be biased to cause a deformation of the cantilever elements by the piezoelectric effect. A first stopper arrangement is integrated in the die and configured to interact with the cantilever elements to limit a movement thereof in a first direction of a vertical axis orthogonal to the horizontal plane, x-y plane towards the underlying central opening.Type: GrantFiled: January 22, 2020Date of Patent: August 16, 2022Assignee: STMICROELECTRONICS S.r.l.Inventors: Fabrizio Cerini, Enri Duqi, Silvia Adorno, Lorenzo Baldo
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Publication number: 20220238485Abstract: A packaged electronic system having a support formed by an insulating organic substrate housing a buried conductive region that is floating. A first die is fixed to the support and carries, on a first main surface, a first die contact region capacitively coupled to a first portion of the buried conductive region. A second die is fixed to the support and carries, on a first main surface, a second die contact region capacitively coupled to a second portion of the buried conductive region. A packaging mass encloses the first die, the second die, the first die contact region, the second die contact region, and, at least partially, the support.Type: ApplicationFiled: January 20, 2022Publication date: July 28, 2022Applicant: STMICROELECTRONICS S.r.l.Inventors: Dario PACI, Silvia ADORNO, Marco DEL SARTO, Fabrizio CERINI, Alex GRITTI
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Patent number: 11350218Abstract: A piezoelectric microelectromechanical acoustic transducer, having a semiconductor substrate with a frame portion and a through cavity defined internally by the frame portion; an active membrane, suspended above the through cavity and anchored, at a peripheral portion thereof, to the frame portion of the substrate by an anchorage structure, a plurality of piezoelectric sensing elements carried by a front surface of the active membrane so as to detect mechanical stresses of the active membrane; a passive membrane, suspended above the through cavity, underneath the active membrane, interposed between the through cavity and a rear surface of the active membrane; and a pillar element, which fixedly couples, and is centrally interposed between, the active membrane and the passive membrane. A ventilation hole passes through the entire active membrane, the passive membrane and the pillar element to set the through cavity in fluidic communication with the front surface of the active membrane.Type: GrantFiled: May 22, 2020Date of Patent: May 31, 2022Assignee: STMicroelectronics S.r.l.Inventors: Fabrizio Cerini, Silvia Adorno
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Patent number: 11317219Abstract: A method for manufacturing a filtering module comprising the steps of: forming a multilayer body comprising a filter layer of semiconductor material and having a thickness of less than 10 ?m, a first structural layer coupled to a first side of the filter layer, and a second structural layer coupled to a second side, opposite to the first side, of the filter layer; forming a recess in the first structural layer, which extends throughout its thickness; removing selective portions, exposed through the recess, of the filter layer to form a plurality of openings, which extend throughout the thickness of the filter layer; and completely removing the second structural layer to connect fluidically the first and second sides of the filter layer, thus forming a filtering membrane designed to inhibit passage of contaminating particles.Type: GrantFiled: November 22, 2019Date of Patent: April 26, 2022Assignee: STMICROELECTRONICS S.R.L.Inventors: Matteo Perletti, Federico Vercesi, Silvia Adorno, Giorgio Allegato
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Publication number: 20220123105Abstract: An electrode structure includes a pad of conductive material, and a conductive strip having a first end physically and electrically coupled to the pad. The pad includes an annular element internally defining a through opening. The first end of the conductive strip is physically and electrically coupled to the annular element by a transition region so that, when the conductive strip undergoes expansion by the thermal effect, a stress spreads from the conductive strip to the annular element by the transition region.Type: ApplicationFiled: October 5, 2021Publication date: April 21, 2022Applicant: STMicroelectronics S.r.l.Inventors: Fabrizio CERINI, Silvia ADORNO, Dario PACI, Marco SALINA
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Patent number: 11051113Abstract: A piezoelectric MEMS transducer formed in a body of semiconductor material, which has a central axis and a peripheral area and comprises a plurality of beams, transverse to the central axis and having a first end, coupled to the peripheral area of the body, and a second end, facing the central axis; a membrane, transverse to the central axis and arranged underneath the plurality of beams; and a pillar, parallel to the central axis and rigid with the second end of the beams and to the membrane. The MEMS transducer further comprises a plurality of piezoelectric sensing elements arranged on the plurality of beams.Type: GrantFiled: March 9, 2020Date of Patent: June 29, 2021Assignee: STMICROELECTRONICS S.r.l.Inventors: Fabrizio Cerini, Silvia Adorno, Federico Vercesi
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Publication number: 20210178430Abstract: A micro-machined ultrasonic transducer is proposed. The micro-machined ultrasonic transducer includes a membrane element for transmitting/receiving ultrasonic waves, during the transmission/reception of ultrasonic waves the membrane element oscillating, about an equilibrium position, at a respective resonance frequency. The equilibrium position of the membrane element is variable according to a biasing electric signal applied to the membrane element. The micro-machined ultrasonic transducer further comprises a cap structure extending above the membrane element; the cap structure identifies, between it and the membrane element, a cavity whose volume is variable according to the equilibrium position of the membrane element. The cap structure comprises an opening for inputting/outputting the ultrasonic waves into/from the cavity. The cap structure and the membrane element act as tunable Helmholtz resonator, whereby the resonance frequency is variable according to the volume of the cavity.Type: ApplicationFiled: December 10, 2020Publication date: June 17, 2021Inventors: Silvia ADORNO, Roberto CARMINATI
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Publication number: 20200382876Abstract: A piezoelectric microelectromechanical acoustic transducer, having a semiconductor substrate with a frame portion and a through cavity defined internally by the frame portion; an active membrane, suspended above the through cavity and anchored, at a peripheral portion thereof, to the frame portion of the substrate by an anchorage structure, a plurality of piezoelectric sensing elements carried by a front surface of the active membrane so as to detect mechanical stresses of the active membrane; a passive membrane, suspended above the through cavity, underneath the active membrane, interposed between the through cavity and a rear surface of the active membrane; and a pillar element, which fixedly couples, and is centrally interposed between, the active membrane and the passive membrane. A ventilation hole passes through the entire active membrane, the passive membrane and the pillar element to set the through cavity in fluidic communication with the front surface of the active membrane.Type: ApplicationFiled: May 22, 2020Publication date: December 3, 2020Inventors: Fabrizio CERINI, Silvia ADORNO
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Publication number: 20200236470Abstract: An actuation structure of a MEMS electroacoustic transducer is formed in a die of semiconductor material having a monolithic body with a front surface and a rear surface extending in a horizontal plane x-y plane and defined in which are: a frame; an actuator element arranged in a central opening defined by the frame; cantilever elements, coupled at the front surface between the actuator element and the frame; and piezoelectric regions arranged on the cantilever elements and configured to be biased to cause a deformation of the cantilever elements by the piezoelectric effect. A first stopper arrangement is integrated in the die and configured to interact with the cantilever elements to limit a movement thereof in a first direction of a vertical axis orthogonal to the horizontal plane, x-y plane towards the underlying central opening.Type: ApplicationFiled: January 22, 2020Publication date: July 23, 2020Inventors: Fabrizio CERINI, Enri DUQI, Silvia ADORNO, Lorenzo BALDO
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Publication number: 20200221234Abstract: A piezoelectric MEMS transducer formed in a body of semiconductor material, which has a central axis and a peripheral area and comprises a plurality of beams, transverse to the central axis and having a first end, coupled to the peripheral area of the body, and a second end, facing the central axis; a membrane, transverse to the central axis and arranged underneath the plurality of beams; and a pillar, parallel to the central axis and rigid with the second end of the beams and to the membrane. The MEMS transducer further comprises a plurality of piezoelectric sensing elements arranged on the plurality of beams.Type: ApplicationFiled: March 9, 2020Publication date: July 9, 2020Inventors: Fabrizio CERINI, Silvia ADORNO, Federico VERCESI
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Patent number: 10623866Abstract: A piezoelectric MEMS transducer formed in a body of semiconductor material, which has a central axis and a peripheral area and comprises a plurality of beams, transverse to the central axis and having a first end, coupled to the peripheral area of the body, and a second end, facing the central axis; a membrane, transverse to the central axis and arranged underneath the plurality of beams; and a pillar, parallel to the central axis and rigid with the second end of the beams and to the membrane. The MEMS transducer further comprises a plurality of piezoelectric sensing elements arranged on the plurality of beams.Type: GrantFiled: April 19, 2019Date of Patent: April 14, 2020Assignee: STMICROELECTRONICS S.R.L.Inventors: Fabrizio Cerini, Silvia Adorno, Federico Vercesi
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Publication number: 20200092659Abstract: A method for manufacturing a filtering module comprising the steps of: forming a multilayer body comprising a filter layer of semiconductor material and having a thickness of less than 10 ?m, a first structural layer coupled to a first side of the filter layer, and a second structural layer coupled to a second side, opposite to the first side, of the filter layer; forming a recess in the first structural layer, which extends throughout its thickness; removing selective portions, exposed through the recess, of the filter layer to form a plurality of openings, which extend throughout the thickness of the filter layer; and completely removing the second structural layer to connect fluidically the first and second sides of the filter layer, thus forming a filtering membrane designed to inhibit passage of contaminating particles.Type: ApplicationFiled: November 22, 2019Publication date: March 19, 2020Inventors: Matteo PERLETTI, Federico VERCESI, Silvia ADORNO, Giorgio ALLEGATO
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Patent number: 10555091Abstract: A method for manufacturing a filtering module comprising the steps of: forming a multilayer body comprising a filter layer of semiconductor material and having a thickness of less than 10 ?m, a first structural layer coupled to a first side of the filter layer, and a second structural layer coupled to a second side, opposite to the first side, of the filter layer; forming a recess in the first structural layer, which extends throughout its thickness; removing selective portions, exposed through the recess, of the filter layer to form a plurality of openings, which extend throughout the thickness of the filter layer; and completely removing the second structural layer to connect fluidically the first and second sides of the filter layer, thus forming a filtering membrane designed to inhibit passage of contaminating particles.Type: GrantFiled: September 11, 2018Date of Patent: February 4, 2020Assignee: STMICROELECTRONICS S.R.L.Inventors: Matteo Perletti, Federico Vercesi, Silvia Adorno, Giorgio Allegato
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Publication number: 20190327562Abstract: A piezoelectric MEMS transducer formed in a body of semiconductor material, which has a central axis and a peripheral area and comprises a plurality of beams, transverse to the central axis and having a first end, coupled to the peripheral area of the body, and a second end, facing the central axis; a membrane, transverse to the central axis and arranged underneath the plurality of beams; and a pillar, parallel to the central axis and rigid with the second end of the beams and to the membrane. The MEMS transducer further comprises a plurality of piezoelectric sensing elements arranged on the plurality of beams.Type: ApplicationFiled: April 19, 2019Publication date: October 24, 2019Inventors: Fabrizio CERINI, Silvia ADORNO, Federico VERCESI
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Patent number: 10433068Abstract: A MEMS acoustic transducer provided with: a substrate of semiconductor material, having a back surface and a front surface opposite with respect to a vertical direction; a first cavity formed within the substrate, which extends from the back surface to the front surface; a membrane which is arranged at the upper surface, suspended above the first cavity and anchored along a perimeter thereof to the substrate; and a combfingered electrode arrangement including a number of mobile electrodes coupled to the membrane and a number of fixed electrodes coupled to the substrate and facing respective mobile electrodes for forming a sensing capacitor, wherein a deformation of the membrane as a result of incident acoustic pressure waves causes a capacitive variation of the sensing capacitor. In particular, the combfingered electrode arrangement lies vertically with respect to the membrane and extends parallel thereto.Type: GrantFiled: November 30, 2016Date of Patent: October 1, 2019Assignee: STMicroelectronics S.r.l.Inventors: Matteo Perletti, Igor Varisco, Luca Lamagna, Silvia Adorno, Gabriele Gattere, Carlo Valzasina, Sebastiano Conti
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Publication number: 20190090067Abstract: A method for manufacturing a filtering module comprising the steps of: forming a multilayer body comprising a filter layer of semiconductor material and having a thickness of less than 10 ?m, a first structural layer coupled to a first side of the filter layer, and a second structural layer coupled to a second side, opposite to the first side, of the filter layer; forming a recess in the first structural layer, which extends throughout its thickness; removing selective portions, exposed through the recess, of the filter layer to form a plurality of openings, which extend throughout the thickness of the filter layer; and completely removing the second structural layer to connect fluidically the first and second sides of the filter layer, thus forming a filtering membrane designed to inhibit passage of contaminating particles.Type: ApplicationFiled: September 11, 2018Publication date: March 21, 2019Inventors: Matteo PERLETTI, Federico VERCESI, Silvia ADORNO, Giorgio ALLEGATO
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Patent number: 9961451Abstract: A MEMS acoustic transducer has: a detection structure, which generates an electrical detection quantity as a function of a detected acoustic signal; and an electronic interface circuit, which is operatively coupled to the detection structure and generates an electrical output quantity as a function of the electrical detection quantity.Type: GrantFiled: September 18, 2015Date of Patent: May 1, 2018Assignee: STMicroelectronics S.r.l.Inventors: Germano Nicollini, Silvia Adorno, Andrea Barbieri, Federica Barbieri, Sebastiano Conti, Edoardo Marino, Sergio Pernici