Abstract: A test chamber is used within a system for testing microelectromechanical systems (MEMS) pressure sensors. The system includes a processor, two air tanks pressurized to different air pressures, a high speed switch mechanism, and the test chamber. The test chamber houses a MEMS pressure sensor to be tested, a control pressure sensor, and a temperature sensor. The MEMS pressure sensor and the control pressure sensor are located in a cavity within the test chamber. The cavity is of minimal size and has a domed inner surface. A response time of the MEMS pressure sensor within the cavity can be characterized by utilizing the system and subjecting the MEMS pressure sensor to a pressure stimulus pulse produced by switching between the two air tanks.

Abstract: A system includes a rotary platform adapted to undergo oscillatory motion about a fixed point, a test fixture coupled to the rotary platform, the test fixture being adapted to receive a device-under-test, and an inertial sensor mounted to the rotary platform for providing a motion output signal indicative of the oscillatory motion. A controller is in communication with the rotary platform and inertial sensor. The controller receives the motion output signal and provides a drive signal to the rotary platform responsive to the motion output signal. The controller generates the drive signal in response a test profile and the motion output signal provides feedback of actual movement of the rotary platform. The motion output signal is input to the controller to ensure correspondence between the drive signal and the test profile. A multitude of differing validated environmental vibrational stimuli effects can be evaluated via a sense signal from the device.

Abstract: A system includes a rotary platform adapted to undergo oscillatory motion about a fixed point, a test fixture coupled to the rotary platform, the test fixture being adapted to receive a device-under-test, and an inertial sensor mounted to the rotary platform for providing a motion output signal indicative of the oscillatory motion. A controller is in communication with the rotary platform and inertial sensor. The controller receives the motion output signal and provides a drive signal to the rotary platform responsive to the motion output signal. The controller generates the drive signal in response a test profile and the motion output signal provides feedback of actual movement of the rotary platform. The motion output signal is input to the controller to ensure correspondence between the drive signal and the test profile. A multitude of differing validated environmental vibrational stimuli effects can be evaluated via a sense signal from the device.

Abstract: A test chamber is used within a system for testing microelectromechanical systems (MEMS) pressure sensors. The system includes a processor, two air tanks pressurized to different air pressures, a high speed switch mechanism, and the test chamber. The test chamber houses a MEMS pressure sensor to be tested, a control pressure sensor, and a temperature sensor. The MEMS pressure sensor and the control pressure sensor are located in a cavity within the test chamber. The cavity is of minimal size and has a domed inner surface. A response time of the MEMS pressure sensor within the cavity can be characterized by utilizing the system and subjecting the MEMS pressure sensor to a pressure stimulus pulse produced by switching between the two air tanks.