Patents by Inventor Silvio Del Monaco

Silvio Del Monaco has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for removing particles from a polishing pad
    Patent number: 7883393
    Abstract: A system for removing particles from a polishing pad to improve the efficiency of the removal of material by the polishing pad as part of a chemical-mechanical polishing process, the system comprising a polishing pad; a fluid dispenser arranged to dispense a fluid on the polishing pad; and removal means, wherein the removal means include a heater for increasing the temperature of the fluid dispensed on the polishing pad, and/or voltage means for coupling the polishing pad to a voltage source for repelling charged particles from the polishing pad surface while the fluid dispenser is dispensing the fluid on the polishing pad.
    Type: Grant
    Filed: November 8, 2005
    Date of Patent: February 8, 2011
    Assignees: Freescale Semiconductor, Inc., ST Microelectronics SRL, ST Microelectronics Crolles SAS
    Inventors: Srdjan Kordic, Sebastien Petitdidier, Janos Farkas, Silvio Del Monaco
  • System and Method for Removing Particles From a Polishing Pad
    Publication number: 20080287041
    Abstract: A system for removing particles from a polishing pad to improve the efficiency of the removal of material by the polishing pad as part of a chemical-mechanical polishing process, the system comprising a polishing pad; a fluid dispenser arranged to dispense a fluid on the polishing pad; and removal means, wherein the removal means include a heater for increasing the temperature of the fluid dispensed on the polishing pad, and/or voltage means for coupling the polishing pad to a voltage source for repelling charged particles from the polishing pad surface while the fluid dispenser is dispensing the fluid on the polishing pad.
    Type: Application
    Filed: November 8, 2005
    Publication date: November 20, 2008
    Applicant: Freescale Semiconductor, Inc.
    Inventors: Srdjan Kordic, Sebastien Petitdidier, Janos Farkas, Silvio Del Monaco