Patents by Inventor Silvio Rabello

Silvio Rabello has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20060187466
    Abstract: To select a unit cell configuration for a repeating structure in optical metrology, a plurality of unit cell configurations are defined for the repeating structure. Each unit cell configuration is defined by one or more unit cell parameters. Each unit cell of the plurality of unity cell configurations differs from one another in at least one unit cell parameter. One or more selection criteria are used to select one of the plurality of unit cell configurations. The selected unit cell configuration can then be used to characterize the top-view profile of the repeating structure.
    Type: Application
    Filed: September 2, 2005
    Publication date: August 24, 2006
    Applicant: Timbre Technologies, Inc.
    Inventors: Shifang Li, Serguei Komarov, Makoto Miyagi, Silvio Rabello, Junwei Bao, Joerg Bischoff