Abstract: Disclosed are a rare earth rotary target and a preparation method therefor. The rare earth rotary target includes a back tube and at least one rare earth target tube welded outside of the back tube; and the back tube and the rare earth target tube are welded via an intermediate welding layer. The intermediate welding layer includes a metal indium solder and an aluminum sheet arranged in the metal indium solder. The aluminum content in the intermediate welding layer is 3-10 wt. %. The back tube, the aluminum sheet, and the rare earth target tube are concentric cylindrical structures. According to the technical solution of the present application, the melting point of the solder is increased, thus achieving the purpose of improving the sputtering power density and a target utilization rate of rare earth rotary targets.

Abstract: Disclosed are a co-sputtering rare earth rotating target material, and a preparation method and an application method therefor. The co-sputtering rare earth rotating target material includes two sections of end target tubes arranged at an axial end of the target material, and a plurality of sections of rare earth target tubes and a plurality of sections of co-sputtering target tubes which are arranged between the two sections of end target tubes and with a target material along an axial middle region, wherein the plurality of sections of rare earth target tubes are spaced apart from the plurality of sections of co-sputtering target tubes, and the target tubes are mutually assembled via welding; and the co-sputtering target tubes are selected from at least one of aluminum, copper, nickel, iron and praseodymium target tubes, and the end target tubes are non-rare earth target tubes or rare earth target tubes.