Patents by Inventor Simon Gijsbert MATHIJSSEN

Simon Gijsbert MATHIJSSEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METROLOGY METHOD AND APPARATUS THEREFOR
    Publication number: 20210356873
    Abstract: A method to measure a parameter of a manufacturing process, the method including illuminating a target with radiation, detecting scattered radiation from the target, and determining the parameter of interest from an asymmetry of the detected radiation.
    Type: Application
    Filed: September 19, 2019
    Publication date: November 18, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Arie Jeffrey DEN BOEF, Kaustuve BHATTACHARYYA, Kenji MORISAKI, Simon Gijsbert MATHIJSSEN