Patents by Inventor Simon Hendrick Celine VAN GRORP

Simon Hendrick Celine VAN GRORP has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF DETERMINING CONTROL PARAMETERS OF A DEVICE MANUFACTURING PROCESS
    Publication number: 20230058839
    Abstract: A method for determining a metric of a feature on a substrate obtained by a semiconductor manufacturing process involving a lithographic process, the method including: obtaining an image of at least part of the substrate, wherein the image includes at least the feature; determining a contour of the feature from the image; determining a plurality of segments of the contour; determining respective weights for each of the plurality of segments; determining, for each of the segments, an image-related metric; and determining the metric of the feature in dependence on the weights and the calculated image-related metric of each of the segments.
    Type: Application
    Filed: October 25, 2022
    Publication date: February 23, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Wim Tjibbo TEL, Mark John MASLOW, Koenraad VAN INGEN SCHENAU, Patrick WARNAAR, Abraham SLACHTER, Roy ANUNCIADO, Simon Hendrick Celine VAN GRORP, Frank STAALS, Marinus JOCHEMSEN