Patents by Inventor Simon HUISMAN

Simon HUISMAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METROLOGY DEVICE AND PHASE MODULATOR APPARATUS THEREFOR
    Publication number: 20220299751
    Abstract: Disclosed is a phase modulator apparatus comprises at least a first phase modulator for modulating input radiation, and a metrology device comprising such a phase modulator apparatus. The first phase modulator comprises a first moving grating in at least an operational state for diffracting the input radiation and Doppler shifting the frequency of the diffracted radiation; and a first compensatory grating element comprising a pitch configured to compensate for wavelength dependent dispersion of at least one diffraction order of said diffracted radiation.
    Type: Application
    Filed: July 27, 2020
    Publication date: September 22, 2022
    Applicant: ASML Netherlands B.V.
    Inventors: Arie Jeffrey DEN BOEF, Simon HUISMAN