Patents by Inventor Simon Lutz

Simon Lutz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20260104571
    Abstract: A mirror system comprises: an EUV mirror having an optical surface having a high reflectivity for EUV radiation; and a frame structure carrying a system component of the mirror system. The frame structure comprises a structure body and an insert. The insert comprises (or consists of) a material whose thermal properties deviate from the thermal properties of the material of the structure body. A fluid channel for a temperature-regulating fluid is formed in the structure body. The insert is exposed to a heat load during operation of the mirror system. The insert spans a contour line transversely to the direction of the fluid channel so that a cross-sectional portion of the fluid channel is accommodated within the contour line. The disclosure furthermore relates to a microlithographic projection exposure apparatus comprising such a mirror system.
    Type: Application
    Filed: December 8, 2025
    Publication date: April 16, 2026
    Inventors: Willi Anderl, Paul Buettner, Felix Weinbuch, Simon Lutz, Igor Altenberger, Johannes Kruis