Abstract: A device for leak detection on a test specimen, comprising a mass spectrometer (12), an at least three-stage turbomolecular pump (14), the input stage (18) of which is connected to the mass spectrometer (12) and which has a first intermediate gas inlet arranged between the input pump stage and the intermediate pump stage (26) and a second intermediate gas inlet arranged between the intermediate pump stage (26) and the output pump stage (24), an at least two-stage booster pump, the input pump stage (46) of which can be connected to the test specimen to be examined and which has an intermediate gas outlet (54) arranged between the input pump stage (46) and the output pump stage (48) and a pre-vacuum pump (22) which is connected to the outlet (20) of the output pump stage (24) of the turbomolecular pump (14) and is configured to generate a pre-vacuum pressure of less than 50 mbar at the outlet (20) of the turbomolecular pump (14) and to evacuate it against atmospheric pressure, characterized in that the intermed

Abstract: A leak detection device for combined integral and localizing leak detection, comprising a test specimen port (14), a test specimen high vacuum pump (16), the inlet of which is connected with the test specimen port (14), at least one pre-vacuum pump (20), the inlet of which is connected via a test specimen line (18) with the outlet (19) of the test specimen high vacuum pump (16), and a gas detector (32) connected with the pre-vacuum pump (20), which is connected via at least a first gas line (28) with the test specimen high vacuum pump (16), the test specimen line (18) and/or the specimen port (14) such that gas from the test specimen port (14) is supplied to the gas detector (32) via the gas line (28) for gas analysis, characterized in that a gas pressure measuring volume (22) connected with a gas pressure sensor is configured in the test specimen line (18) such that, during the gas measurement with the gas detector (32), an integral leak detection can be carried out by measuring the pressure profile in the g

Abstract: A device for leak detection on a test specimen, comprising a mass spectrometer (12), an at least three-stage turbomolecular pump (14), the input stage (18) of which is connected to the mass spectrometer (12) and which has a first intermediate gas inlet arranged between the input pump stage and the intermediate pump stage (26) and a second intermediate gas inlet arranged between the intermediate pump stage (26) and the output pump stage (24), an at least two-stage booster pump, the input pump stage (46) of which can be connected to the test specimen to be examined and which has an intermediate gas outlet (54) arranged between the input pump stage (46) and the output pump stage (48) and a pre-vacuum pump (22) which is connected to the outlet (20) of the output pump stage (24) of the turbomolecular pump (14) and is configured to generate a pre-vacuum pressure of less than 50 mbar at the outlet (20) of the turbomolecular pump (14) and to evacuate it against atmospheric pressure, characterized in that the intermed