Patents by Inventor Simon Maus

Simon Maus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230384164
    Abstract: A method of forming an infrared detector includes defining an optical window in a cover substrate. Defining the optical window includes forming a multilayer interference filter or a periodic diffraction grating on an upper surface of the optical window and a periodic diffraction grating on the lower surface of the optical window. The method also includes performing anodic bonding of a spacer onto the cover substrate, transferring the cover substrate provided onto a base substrate, and hermetically bonding the spacer onto the base substrate.
    Type: Application
    Filed: August 4, 2021
    Publication date: November 30, 2023
    Inventors: David Bunel, Ulli Hansen, Simon Maus
  • Publication number: 20220415645
    Abstract: Provided is a method for manufacturing a component arrangement for a package, including providing a wafer made of a semiconductor material having a polished wafer surface; forming an opening in the wafer by anisotropic etching, wherein an anisotropically etched surface is manufactured near the opening; separating a component from the anisotropically etched wafer, wherein the separated component is manufactured having the following surfaces: an optical surface formed near a surface portion of the polished wafer surface and a mounting surface formed in the region of the anisotropically etched surface; and mounting the separated component on a substrate surface of a carrier substrate using the mounting surface in such a manner that the anisotropically etched surface is bonded to the substrate surface, wherein the optical surface is arranged as an inclined exposed surface. Furthermore, a component arrangement and a package are provided having a component arrangement.
    Type: Application
    Filed: June 22, 2020
    Publication date: December 29, 2022
    Inventors: Simon Maus, Ulli Hansen
  • Publication number: 20220310890
    Abstract: Provided is a component arrangement, including a carrier substrates; a spacer which is arranged on the carrier substrate so as to surround an installation space and has an outlet opening on a side facing away from the carrier substrate; an optical component arranged in the installation space; a contact connection which electrically conductively connects the optical component to external contacts arranged outside the installation space; a cover substrate which is arranged on the spacer and with which the outlet opening is covered in a light-permeable manner; and a light-reflecting surface which is formed on an anisotropically etched silicon component and is arranged in the installation space as an inclined surface at an angle of approx.
    Type: Application
    Filed: February 11, 2019
    Publication date: September 29, 2022
    Inventors: Ulli HANSEN, Simon MAUS, Oliver GYENGE, Rachid ABDALLAH
  • Patent number: 10954591
    Abstract: The invention relates to a method for producing a structured coating on a substrate, wherein the method comprises the following steps: providing a substrate having a surface to be coated and producing a structured coating on the surface of the substrate to be coated by depositing at least one evaporation coating material, namely aluminium oxide, silicon dioxide, silicon nitride, or titanium dioxide, on the surface of the substrate to be coated by means of thermal evaporation of the at least one evaporation coating material and using additive structuring. The invention further relates to a coated substrate and a semi-finished product having a coated substrate.
    Type: Grant
    Filed: July 22, 2010
    Date of Patent: March 23, 2021
    Assignee: MSG LITHOGLAS AG
    Inventors: Jürgen Leib, Ulli Hansen, Simon Maus
  • Patent number: 10580912
    Abstract: An arrangement including a carrier substrate, and a component situated on a cover surface of the carrier substrate in a hollow space, and electrical contacts for the component, wherein the hollow space is comprised of a plurality of spacer elements arranged on the cover surface of the carrier substrate and a cover substrate mounted on the plurality of spacer elements is provided. A semi-finished product comprising a carrier substrate made of silicon, wherein one or more recesses are formed on one side of the carrier substrate, and wherein the semi-finished product further comprises an alkaline evaporated glass applied to the side of the carrier substrate having the one or more recesses is also provided.
    Type: Grant
    Filed: March 2, 2015
    Date of Patent: March 3, 2020
    Assignee: MSG LITHOGLAS AG
    Inventors: Simon Maus, Ulli Hansen
  • Publication number: 20150179828
    Abstract: An arrangement including a carrier substrate, and a component situated on a cover surface of the carrier substrate in a hollow space, and electrical contacts for the component, wherein the hollow space is comprised of a plurality of spacer elements arranged on the cover surface of the carrier substrate and a cover substrate mounted on the plurality of spacer elements is provided. A semi-finished product comprising a carrier substrate made of silicon, wherein one or more recesses are formed on one side of the carrier substrate, and wherein the semi-finished product further comprises an alkaline evaporated glass applied to the side of the carrier substrate having the one or more recesses is also provided.
    Type: Application
    Filed: March 2, 2015
    Publication date: June 25, 2015
    Inventors: SIMON MAUS, ULLI HANSEN
  • Patent number: 8966748
    Abstract: The invention relates to a method for manufacturing an arrangement with a component on a carrier substrate, wherein the method encompasses the following steps: Manufacturing spacer elements on the rear side of a cover substrate, arranging a component on a cover surface of a carrier substrate, and arranging the spacer elements formed on the carrier substrate so as to situate the component in the at least one hollow space and close the latter. In addition, the invention relates to an arrangement, a method for manufacturing a semi-finished product for a component arrangement, as well as a semi-finished product for a component arrangement.
    Type: Grant
    Filed: September 24, 2010
    Date of Patent: March 3, 2015
    Assignee: MSG Lithoglas AG
    Inventors: Jürgen Leib, Simon Maus, Ulli Hansen
  • Publication number: 20150014866
    Abstract: A method for producing a glass-like layer (3) on a substrate, e.g. a power semiconductor substrate (1), is disclosed. The method comprises the deposition of a glass-like layer vapor-deposited material with plasma-assisted electron beam evaporation. An electronic component can be produced using this method.
    Type: Application
    Filed: September 29, 2014
    Publication date: January 15, 2015
    Inventors: Simon Maus, Ulli Hansen
  • Patent number: 8659206
    Abstract: The invention relates to a method for producing a dielectric layer (3) in an electroacoustic component (1), in particular a component operating with acoustic surface waves or bulk acoustic waves, comprising a substrate and an associated electrode structure, in which the dielectric layer (3) is formed at least in part by depositing by a thermal vapor deposition process at least one evaporation material selected from the following group of layer vaporising materials: vapor deposition glass material such as borosilicate glass, silicon nitride and aluminum oxide. The invention further relates to an electroacoustic component.
    Type: Grant
    Filed: July 23, 2009
    Date of Patent: February 25, 2014
    Assignee: MSG Lithoglas AG
    Inventors: Ulli Hansen, Jürgen Leib, Simon Maus
  • Publication number: 20120314393
    Abstract: The invention relates to a method for manufacturing an arrangement with a component on a carrier substrate, wherein the method encompasses the following steps: Manufacturing spacer elements on the rear side of a cover substrate, arranging a component on a cover surface of a carrier substrate, and arranging the spacer elements formed on the carrier substrate so as to situate the component in the at least one hollow space and close the latter. In addition, the invention relates to an arrangement, a method for manufacturing a semi-finished product for a component arrangement, as well as a semi-finished product for a component arrangement.
    Type: Application
    Filed: September 24, 2010
    Publication date: December 13, 2012
    Applicant: MSG LITHOGLAS AG
    Inventors: Jürgen Leib, Simon Maus, Ulli Hansen
  • Publication number: 20120231212
    Abstract: The invention relates to a method for producing a structured coating on a substrate, wherein the method comprises the following steps: providing a substrate having a surface to be coated and producing a structured coating on the surface of the substrate to be coated by depositing at least one evaporation coating material, namely aluminium oxide, silicon dioxide, silicon nitride, or titanium dioxide, on the surface of the substrate to be coated by means of thermal evaporation of the at least one evaporation coating material and using additive structuring. The invention further relates to a coated substrate and a semi-finished product having a coated substrate.
    Type: Application
    Filed: July 22, 2010
    Publication date: September 13, 2012
    Inventors: Jürgen Leib, Ulli Hansen, Simon Maus
  • Publication number: 20110175487
    Abstract: The invention relates to a method for producing a dielectric layer (3) in an electroacoustic component (1), in particular a component operating with acoustic surface waves or bulk acoustic waves, comprising a substrate and an associated electrode structure, in which the dielectric layer (3) is formed at least in part by depositing by a thermal vapour deposition process at least one evaporation material selected from the following group of layer vaporising materials: vapour deposition glass material such as borosilicate glass, silicon nitride and aluminium oxide. The invention further relates to an electroacoustic component.
    Type: Application
    Filed: July 23, 2009
    Publication date: July 21, 2011
    Inventors: Ulli Hansen, Jürgen Leib, Simon Maus