Patents by Inventor Simon SCHUTZBACH

Simon SCHUTZBACH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Adapter, connection device and supply system
    Patent number: 11776827
    Abstract: An adapter for a liquid container of a supply system of a wet process module for the treatment of substrates has a container part for fastening to the liquid container and a channel part for fastening to the supply system. The container part has a central opening and a fastening device for fastening the container part to the liquid container. The channel part has a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part.
    Type: Grant
    Filed: July 29, 2021
    Date of Patent: October 3, 2023
    Inventors: Michael Braun, Simon Schutzbach, Kader Mekias, Dinesh Vijayaraghavan, Orazio Monteserrato
  • ADAPTER, CONNECTION DEVICE AND SUPPLY SYSTEM
    Publication number: 20220037168
    Abstract: An adapter for a liquid container of a supply system of a wet process module for the treatment of substrates has a container part for fastening to the liquid container and a channel part for fastening to the supply system. The container part has a central opening and a fastening device for fastening the container part to the liquid container. The channel part has a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part.
    Type: Application
    Filed: July 29, 2021
    Publication date: February 3, 2022
    Inventors: Michael BRAUN, Simon SCHUTZBACH, Kader MEKIAS, Dinesh VIJAYARAGHAVAN, Orazio MONTESERRATO
  • WET PROCESS MODULE AND METHOD OF OPERATION
    Publication number: 20210402431
    Abstract: A wet process module, in particular a lacquering module, for the treatment of substrates, in particular wafers, has a process chamber having a process pot for treating the substrate, an air inlet for supplying air into the process chamber, at least one bypass outlet and at least one process pot outlet. The at least one bypass outlet and the at least one process pot outlet are air outlets for discharging air out of the process chamber. Furthermore, the at least one process pot outlet is provided in the process pot and the at least one bypass outlet is provided outside the process pot.
    Type: Application
    Filed: June 25, 2021
    Publication date: December 30, 2021
    Inventors: Michael BRAUN, Simon SCHUTZBACH