Patents by Inventor Simon Shmookler

Simon Shmookler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for automated positioning of a substrate in a processing chamber
    Patent number: 5483138
    Abstract: An improved position control means for robotic handling systems; particularly, a system and method for determining the centerpoint of a moving object, such as a semiconductor wafer, and calibration of the object support, using an array of sensors positioned generally transverse to the arcuate path of movement of the object and its support to detect the relative positions of the object and the support to a selected destination point for the purpose of precisely positioning the object relative to the selected destination point.
    Type: Grant
    Filed: April 21, 1994
    Date of Patent: January 9, 1996
    Assignee: Applied Materials, Inc.
    Inventors: Simon Shmookler, Andrew G. Weinberg, Martin J. McGrath